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High Temperature Absolute Pressure Transducers
Our high temperature Baratron® capacitance manometers are controlled to temperatures of 150°C or higher for use use in demanding semiconductor manufacturing vacuum processes such as metal etching and nitride film chemical vapor deposition (CVD).
DA03B Heated (150 - 200°C) 1 - 1000 Torr, Absolute Baratron® Capacitance Manometer with EtherCAT®
- Long-term performance in ALD, CVD, Lyophilization, and other advanced manufacturing processes
- Minimizes the deposition of byproducts
- Provides fail-safe over-temperature protection
631F 1-1000 Torr Heated (150 or 200°C) Absolute Baratron® Capacitance Manometer
- 150°C or 200°C operating temperatures reduce contamination
- 0 to 10 VDC analog output proportional to absolute pressure
- Two optional pressure trip relays for controlling external equipment
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