The DA06A Baratron® Capacitance Manometer provides three decades of pressure output with enhanced accuracy and calibration points from 1 Torr to 1 mTorr for advanced processes like etch and deposition. Designed with a wide and high accuracy pressure range, a single DA06A can be used in place of multiple manometers, thereby simplifying system integration, reducing overall system mechanical and electrical hardware and cabling, and freeing up valuable process chamber space.
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DA06A Baratron® Manometer Manual(1.2 MB, PDF)
