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  5. DA06A 3 Decade Heated Baratron® Capacitance Manometer with EtherCAT®

DA06A 3 Decade Heated Baratron® Capacitance Manometer with EtherCAT®

Overview Features Resources Contact Us

DA06A 3 Decade Heated Baratron® Capacitance Manometer with EtherCAT®

Overview Features Resources Contact Us

The DA06A Baratron® Capacitance Manometer provides three decades of pressure output with enhanced accuracy and calibration points from 1 Torr to 1 mTorr for advanced processes like etch and deposition. Designed with a wide and high accuracy pressure range, a single DA06A can be used in place of multiple manometers, thereby simplifying system integration, reducing overall system mechanical and electrical hardware and cabling, and freeing up valuable process chamber space.

Resources

Literature

  • DA06A 3-Decade Temperature-controlled Baratron® Manometer with EtherCAT®(2.1 MB, PDF)

Manuals

  • DA06A Baratron® Manometer Manual(1.2 MB, PDF)

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