The Dual-Zone Pressure Controller (DPC) is a highly integrated closed-loop pressure control subsystem. It consists of an inlet pneumatic shut-off valve, two independent channels of pressure control with mass flow metering, and a vacuum outlet. Each pressure control channel of the DPC Dual-Zone Pressure Controller consists of a pressure sensor, a control valve, and a mass flow meter.
Resources
Literature
DPC Dual-Zone Pressure Controller(443.2 kB, PDF)
Device Description Files
DPC EDS File(18.3 kB, EDS)
