The E27H is the solution for etch process-induced drift. Based on the industry-standard Baratron® capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm, which minimizes drift. The E27H Baratron® manometer is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability.
Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
$3,070.00
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E27H.1TBD5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration | $3,070.00 |
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Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
$3,070.00
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E27H.1TDD5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration | $3,070.00 |
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Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration
$3,070.00
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E27H11TBC1B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration | $3,070.00 |
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Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED
$3,213.00
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E27H11TDC2B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED | $3,213.00 |
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Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration, Status LED
$3,649.00
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E27HU2TBE6B Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration, Status LED | $3,649.00 |
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The following options are available for E27H Baratron® Heated Absolute Capacitance Manometers
Ordering Code Example: E27H01TBC1B
Configuration Option | Option Code |
---|---|
E27H Absolute Capacitance Manometer. | E27H |
Full Scale Range |
|
0.02 Torr | U2T |
0.05 Torr | U5T |
0.1 Torr | .1T |
0.25 Torr | RET |
1 Torr | 01T |
2 Torr | 02T |
10 Torr | 11T |
20 Torr | 21T |
100 Torr | 12T |
Fittings |
|
0.5 in. OD Tube | A |
8 VCR female | B |
1.33 in. OD CF | C |
NW16 ISO-KF (range < 5000 Torr) | D |
8 VCO female | E |
2.75 in. OD CF | L |
NW25 ISO-KF (range < 5000 Torr) | Q |
Accuracy |
|
0.12% of Reading | C |
0.15% of Reading | D |
0.25% of Reading | E |
Options |
|
Standard Configuration, vertical calibration | 1 |
Temperature/Heater Status, vertical calibration | 2 |
Standard Configuration, horizontal calibration (ranges <1 Torr only) | 5 |
Temperature/Heater Status, horizontal calibration (ranges <1 Torr only) | 6 |
Connector |
|
15 pin Type "D" with Thread Locks | B |
15 pin Type "D" with Slide Locks | P |