E27H 0.02-100 Torr Heated (45°C) Baratron® Capacitance Manometers with Etch Sensor
Overview
The E27H is the solution for etch process-induced drift. Based on the industry-standard Baratron® capacitance manometer, MKS has developed structures in the sensor that nearly eliminate the deposition of process byproducts on the diaphragm, which minimizes drift. The E27H Baratron® manometer is temperature controlled to 45°C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability.
- Temperature controlled to 45°C for up to 0.12% of reading accuracy
- 0 to 10 VDC analog output proportional to absolute pressure
- Etch baffle sensor significantly reduces the ability of byproducts to reach the sensor
- Full Scale ranges low as 20 mTorr for precise low pressure measurement
- All Inconel® sensor-corrosion resistant wetted surfaces
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
|
Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
$3,070.00
|
E27H.1TBD5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration | $3,070.00 |
|
|||
|
|
Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration
$3,070.00
|
E27H.1TDD5B Heated Capacitance Manometer w/Etch Sensor, 0.1 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.15%/Rdg Accuracy, Horizontal Calibration | $3,070.00 |
|
|||
|
|
Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration
$3,070.00
|
E27H11TBC1B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration | $3,070.00 |
|
|||
|
|
Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED
$3,213.00
|
E27H11TDC2B Heated Capacitance Manometer w/Etch Sensor, 10 Torr, 45°C, NW16 ISO-KF, DB15 w/Thread Lock, 0.12%/Rdg Accuracy, Vertical Calibration, Status LED | $3,213.00 |
|
|||
|
|
Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration, Status LED
$3,649.00
|
E27HU2TBE6B Heated Capacitance Manometer w/Etch Sensor, 0.02 Torr, 45°C, 8 VCR-F, DB15 w/Thread Lock, 0.25%/Rdg Accuracy, Vertical Calibration, Status LED | $3,649.00 |
|
Configuration Options
The following options are available for E27H Baratron® Heated Absolute Capacitance Manometers
Ordering Code Example: E27H01TBC1B
| Configuration Option | Option Code |
|---|---|
| E27H Absolute Capacitance Manometer. | E27H |
Full Scale Range |
|
| 0.02 Torr | U2T |
| 0.05 Torr | U5T |
| 0.1 Torr | .1T |
| 0.25 Torr | RET |
| 1 Torr | 01T |
| 2 Torr | 02T |
| 10 Torr | 11T |
| 20 Torr | 21T |
| 100 Torr | 12T |
Fittings |
|
| 0.5 in. OD Tube | A |
| 8 VCR female | B |
| 1.33 in. OD CF | C |
| NW16 ISO-KF (range < 5000 Torr) | D |
| 8 VCO female | E |
| 2.75 in. OD CF | L |
| NW25 ISO-KF (range < 5000 Torr) | Q |
Accuracy |
|
| 0.12% of Reading | C |
| 0.15% of Reading | D |
| 0.25% of Reading | E |
Options |
|
| Standard Configuration, vertical calibration | 1 |
| Temperature/Heater Status, vertical calibration | 2 |
| Standard Configuration, horizontal calibration (ranges <1 Torr only) | 5 |
| Temperature/Heater Status, horizontal calibration (ranges <1 Torr only) | 6 |
Connector |
|
| 15 pin Type "D" with Thread Locks | B |
| 15 pin Type "D" with Slide Locks | P |
Specifications
-
TypeVacuum/pressure Transducer
-
Measurement TypeAbsolute
-
Sensor TemperatureControlled to 45°C
-
Full Scale Pressure Ranges0.02, 0.05, 0.1, 0.25, 1, 2, 10, 20, and 100 Torr
-
Accuracy0.12% of Reading
0.15% for 0.25, 0.1, and 0.05 Torr
0.25% for 0.02 Torr -
Analog Output0-10 VDC into >10K Ω load
-
Analog Connector15-pin D-sub
-
Zero Temperature Coefficient0.002% of Full Scale/°C for 1-100 Torr ranges
0.005% Full Scale /°C for 0.25 and 0.1 Torr
0.015% Full Scale /°C for 0.05 Torr
0.03% Full Scale /°C for 0.02 Torr
-
Span Temperature Coefficient0.02% of Reading/°C
-
Operating Temperature Range15-40°C
-
Volume6.3 cc
-
Warm-up Timehours for 1 Torr and higher, 4 hours for <1 Torr
-
Overpressure Limit45 psia (310 kPa) or 120% Full Scale , whichever is greater
-
Exposed MaterialsInconel®
-
Power Requirements±15 VDC ±5% @ 0.25 Amps (maximum)
-
ComplianceCE
Features
Resources
Literature
- E27H Heated (45°C) Baratron® Capacitance Manometer with Etch Sensor (1.5 MB, PDF)
- Analog 600 Series Absolute Baratron® Capacitance Manometer Selection Guide (2.9 MB, PDF)
Manuals
- MKS E27H Manometer Manual (602.7 kB, PDF)
- 626, 627, 628, E27 & E28 Capacitance Manometer Pin-outs (22.4 kB, PDF)
Ultra-High Velocity