HFV High Flow, High Conductance Vacuum Valves
Overview
MKS High Flow Valves (HFVs) increase system uptime due to their high cycle count lifetime of 1,000,000 cycles in clean environments and high conductance which allows for faster system pumping. An edge welded stainless steel bellows prevents outgassing and virtual leaks. The bellows stroke length is optimized to assure maximum conductance. The HFVs are designed to be easily and completely disassembled in the field, lowering the cost of replacing parts.
- Edge welded bellows provide maximum stroke length with high conductance
- Bellows-sealed poppet ensures a minimum of 1,000,000 cycles
- 304 stainless steel body, heatable to 160°C
- Can be mounted vertically or horizontally to accommodate footprint requirements
Products
Configuration Options
The following options are available for HFV High Flow Vacuum Isolation Valves
Ordering Code Example: V-250-AM-NVXXX
| Configuration Option | Option Code |
|---|---|
| HFV Vacuum Isolation Valve | V |
| Valve Size | |
| NW100 (4 in. valve) | 100 |
| NW160 (6 in. valve) | 160 |
| NW200 (8 in. valve) | 200 |
| NW250 (10 in. valve) | 250 |
| Body Configuration | |
| Angle Body | A |
| Flange Type | |
| ISO-MF | M |
| Limit Switch | |
| Limit Switch | L |
| No Limit Switch | N |
| Seal Type | |
| Viton® | V |
| Kalrez® | K |
| Chemraz® | Z |
| Heater | |
| No Heater* | XXX |
| Solenoid | |
| 12 VDC | 12D |
| 24 VDC | 24D |
| 24 VAC 50/60 Hz | 24A |
| 120 VAC 50/60 Hz | 120 |
| 240 VAC 50/60 Hz | 240 |
| 1/4 in. Tube Fittings | T25 |
| 1/4 in. Tube Fittings | T38 |
| 1/4 in. NPT Ports | None |
*Heated options are available. Please consult factory for ordering information.
Specifications
-
TypeHigh Conductance Vacuum Valve
-
Vacuum RangeAtmosphere to 1.0 x 10-9 Torr
-
Body ConfigurationAngle, Inline
-
Port SizeNW100, NW160, NW200, NW250
-
Helium Leak Rate1.0 x 10-9 std cc/sec
-
Cylinder Air Pressure60-100 psig
-
Limit Switch Rating5A - 250 VAC
-
Single Pole, Single Throw5A - 30 VDC
-
Closing Time0.300 - 0.750, depending on configuration
-
Typical Life1,000,000 cycles
-
Weight12 - 55 pounds, depending on configuration
Features
Accessories
Replacement Solenoids/Actuators
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
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1084882 Valve Actuator, HFV High Flow and High Conductance Valve, NW100 |
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100016253 Replacement Solenoid, 24 VDC, CRV Valve | $580 |
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100016358 Valve Actuator, HFV High Flow and High Conductance Valve, NW200 or NW250 Port | $1,300 |
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Valve Seals
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
 |
20025912-001 Viton Seal Set, HFV High Flow and High Conductance Valve, NW100 Port |
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20025913-001 Kalrez Seal Set, HFV High Flow and High Conductance Valve, NW100 Port |
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20025914-001 Chemraz Seal Set, HFV High Flow and High Conductance Valve, NW100 Port |
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100016283 Kalrez Seal Set, HFV High Flow and High Conductance Valve, NW160 Port | $1,448 |
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100016282 Viton Seal Set, HFV High Flow and High Conductance Valve, NW160 Port | $30 |
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100016284 Chemraz Seal Set, HFV High Flow and High Conductance Valve, NW160 Port | $1,101 |
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100016285 Perlast Seal Set, HFV High Flow and High Conductance Valve, NW160 Port | $667 |
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100016286 Viton Seal Set, HFV High Flow and High Conductance Valve, NW200 Port | $36 |
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100016287 Kalrez Seal Set, HFV High Flow and High Conductance Valve, NW200 Port | $1,622 |
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100016290 Viton Seal Set, HFV High Flow and High Conductance Valve, NW250 Port | $41 |
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100016288 Chemraz Seal Set, HFV High Flow and High Conductance Valve, NW200 Port | $1,246 |
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100016289 Perlast Seal Set, HFV High Flow and High Conductance Valve, NW200 Port | $748 |
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100016380 Chemraz Seal Set, HFV High Flow and High Conductance Valve, NW250 Port | $1,622 |
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100016379 Kalrez Seal Set, HFV High Flow and High Conductance Valve, NW250 Port | $1,853 |
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100016381 Seal Set, Perlast, HFV High Flow, High Conductance Valve, NW250 Port |
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$995 |
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Internal Rebuild Kits
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
| |
1084830-001 Valve Bellows, HFV High Flow/High Conductance Valve, NW100 |
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100016258 Valve Bellows, HFV High Flow/High Conductance Valve, NW160 | $1,400 |
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100016261 Valve Nosepiece, HFV High Flow/High Conductance Valves, NW160 | $420 |
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100016278 Valve Nosepiece, HFV High Flow/High Conductance Valves, NW200 | $331 |
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100016279 Valve Rebuild Kit, HFV High Flow/High Conductance Valve, NW160 Port | $2,432 |
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100016362 Valve Bellows, HFV High Flow/High Conductance Valve, NW200 or NW250 | $1,525 |
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100016281 Valve Rebuild Kit, HFV High Flow/High Conductance Valves, NW250 | $2,663 |
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100016280 Valve Rebuild Kit, HFV High Flow/High Conductance Valves, NW200 | $2,548 |
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100016365 Valve Nosepiece, HFV High Flow/High Conductance Valve, NW250 Port | $325 |
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1084882 Valve Actuator, HFV High Flow and High Conductance Valve, NW100 |
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Other Accessories
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
| |
20010240-001 Service Tool, HFV High Flow and High Conductance Valve, NW100 Port |
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100016382 Service Tool, HFV High Flow and High Conductance Valve, NW160 Port | $2,800 |
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100016383 Service Tool, HFV High Flow and High Conductance Valve, NW200 Port | $3,242 |
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100016384 Service Tool, HFV High Flow and High Conductance Valve, NW250 Port | $2,850 |
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Ultra-High Velocity