HFV High Flow, High Conductance Vacuum Valves

MKS High Flow Valves (HFVs) increase system uptime due to their high cycle count lifetime of 1,000,000 cycles in clean environments and high conductance which allows for faster system pumping. An edge welded stainless steel bellows prevents outgassing and virtual leaks. The bellows stroke length is optimized to assure maximum conductance. The HFVs are designed to be easily and completely disassembled in the field, lowering the cost of replacing parts.

Edge welded bellows provide maximum stroke length with high conductance
Bellows-sealed poppet ensures a minimum of 1,000,000 cycles
304 stainless steel body, heatable to 160°C
Can be mounted vertically or horizontally to accommodate footprint requirements

See All Features

Configuration Options

The following options are available for HFV High Flow Vacuum Isolation Valves
Ordering Code Example: V-250-AM-NVXXX

Configuration Option	Option Code
HFV Vacuum Isolation Valve	V
Valve Size
NW100 (4 in. valve)	100
NW160 (6 in. valve)	160
NW200 (8 in. valve)	200
NW250 (10 in. valve)	250
Body Configuration
Angle Body	A
Flange Type
ISO-MF	M
Limit Switch
Limit Switch	L
No Limit Switch	N
Seal Type
Viton®	V
Kalrez®	K
Chemraz®	Z
Heater
No Heater*	XXX
Solenoid
12 VDC	12D
24 VDC	24D
24 VAC 50/60 Hz	24A
120 VAC 50/60 Hz	120
240 VAC 50/60 Hz	240
1/4 in. Tube Fittings	T25
1/4 in. Tube Fittings	T38
1/4 in. NPT Ports	None

*Heated options are available. Please consult factory for ordering information.

Description
HIGH-FLOW-VALVE Vacuum Isolation Valve, High Flow

Specifications

Type
High Conductance Vacuum Valve
Vacuum Range
Atmosphere to 1.0 x 10^-9 Torr
Body Configuration
Angle, Inline
Port Size
NW100, NW160, NW200, NW250
Helium Leak Rate
1.0 x 10^-9 std cc/sec
Cylinder Air Pressure
60-100 psig

Limit Switch Rating
5A - 250 VAC
Single Pole, Single Throw
5A - 30 VDC
Closing Time
0.300 - 0.750, depending on configuration
Typical Life
1,000,000 cycles
Weight
12 - 55 pounds, depending on configuration

Features

Applications

Conductance Curve Chart

HFV valves are ideally suited for semiconductor manufacturing, flat panel tools, solar tools, coaters and general high flow (large pump line diameter) manufacturing applications.

Heated Valves

HFVs are available with MKS heater solutions which ensure uniform internal temperature profiles to minimize condensation of process gases. An Ultem insulating barrier between the Festo™ actuator and valve body keeps heat inside the valve and away from the actuator. To accommodate process needs for high temperature or chemical resistance, a variety of elastomer seals are offered, including, Viton®, Chemraz®, and Kalrez®. Like all MKS isolation valves the HFV is offered with air solenoids for pneumatic actuation and limit switches for remote indication of the valve’s position.

Accessories

Replacement Solenoids/Actuators

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		1084882Valve Actuator, HFV High Flow and High Conductance Valve, NW100	UNIVERSAL
		100016358Valve Actuator, HFV High Flow and High Conductance Valve, NW200 or NW250 Port	UNIVERSAL			$1,365

Valve Seals

Description	Compatibility	Price
20025912-001Viton Seal Set, HFV High Flow and High Conductance Valve, NW100 Port	UNIVERSAL
20025913-001Kalrez Seal Set, HFV High Flow and High Conductance Valve, NW100 Port	UNIVERSAL
20025914-001Chemraz Seal Set, HFV High Flow and High Conductance Valve, NW100 Port	UNIVERSAL
100016283Kalrez Seal Set, HFV High Flow and High Conductance Valve, NW160 Port	UNIVERSAL	$1,521
100016282Viton Seal Set, HFV High Flow and High Conductance Valve, NW160 Port	UNIVERSAL	$32
100016284Chemraz Seal Set, HFV High Flow and High Conductance Valve, NW160 Port	UNIVERSAL	$1,157
100016285Perlast Seal Set, HFV High Flow and High Conductance Valve, NW160 Port	UNIVERSAL	$701
100016286Viton Seal Set, HFV High Flow and High Conductance Valve, NW200 Port	UNIVERSAL	$38
100016287Kalrez Seal Set, HFV High Flow and High Conductance Valve, NW200 Port	UNIVERSAL	$1,704
100016290Viton Seal Set, HFV High Flow and High Conductance Valve, NW250 Port	UNIVERSAL	$44
100016288Chemraz Seal Set, HFV High Flow and High Conductance Valve, NW200 Port	UNIVERSAL	$1,309
100016289Perlast Seal Set, HFV High Flow and High Conductance Valve, NW200 Port	UNIVERSAL	$786
100016380Chemraz Seal Set, HFV High Flow and High Conductance Valve, NW250 Port	UNIVERSAL	$1,704
100016379Kalrez Seal Set, HFV High Flow and High Conductance Valve, NW250 Port	UNIVERSAL	$1,946
100016381Seal Set, Perlast, HFV High Flow, High Conductance Valve, NW250 Port	UNIVERSAL	$1,045

Limit Switches

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		100016226Limit Switch Kit, HFV High Flow/High Conductance Valves, NW100, NW160, NW200, NW250	UNIVERSAL

Internal Rebuild Kits

Description	Compatibility	Price
1084830-001Valve Bellows, HFV High Flow/High Conductance Valve, NW100	UNIVERSAL
100016258Valve Bellows, HFV High Flow/High Conductance Valve, NW160	UNIVERSAL	$1,470
100016261Valve Nosepiece, HFV High Flow/High Conductance Valves, NW160	UNIVERSAL	$441
100016278Valve Nosepiece, HFV High Flow/High Conductance Valves, NW200	UNIVERSAL	$348
100016279Valve Rebuild Kit, HFV High Flow/High Conductance Valve, NW160 Port	UNIVERSAL	$2,554
100016362Valve Bellows, HFV High Flow/High Conductance Valve, NW200 or NW250	UNIVERSAL	$1,602
100016281Valve Rebuild Kit, HFV High Flow/High Conductance Valves, NW250	UNIVERSAL	$2,797
100016280Valve Rebuild Kit, HFV High Flow/High Conductance Valves, NW200	UNIVERSAL	$2,676
100016365Valve Nosepiece, HFV High Flow/High Conductance Valve, NW250 Port	UNIVERSAL	$342
1084882Valve Actuator, HFV High Flow and High Conductance Valve, NW100	UNIVERSAL

Other Accessories

Description	Compatibility	Price
20010240-001Service Tool, HFV High Flow and High Conductance Valve, NW100 Port	UNIVERSAL
100016382Service Tool, HFV High Flow and High Conductance Valve, NW160 Port	UNIVERSAL	$2,940
100016383Service Tool, HFV High Flow and High Conductance Valve, NW200 Port	UNIVERSAL	$3,405
100016384Service Tool, HFV High Flow and High Conductance Valve, NW250 Port	UNIVERSAL	$2,993

Resources

Literature

High Flow, High Conductance Vacuum Isolation Valves (HFV)(683 kB, PDF)