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Vacuum Isolation Valves
MKS is a leader in high reliability vacuum isolation valves. Our vacuum isolation valves includes bellows sealed valves, ball valves, soft start dual-stage valves, and safety shut off valves. These are available in a wide array of configurations including manual, pneumatic, and electromagnetic actuators.
LoPro™ Bellows Vacuum Isolation Valves
- NW25 - NW50
- HV pump and line isolation applications
- 1,000,000 cycle rating (clean environments)
LoPro™ Soft-start Bellows Vacuum Isolation Valves
- NW25 - NW50
- Two-stage with adjustable conductance for variable pump down speed
- 1,000,000 cycle rating (clean environments)
Cv™ Compact Bellows Vacuum Isolation Valves
- NW10 - NW25 or VCR
- HV gauge isolation, roughing, bypass or venting
- 1,000,000 cycle rating (clean environments)
CRV Corrosion Resistant Vacuum Isolation Valves
- NW40 - NW50, custom sizes available
- Designed for use in harsh environments
- Shield keeps reactive and corrosive gases from contacting bellows
HCV High-cycle Bellows Vacuum Isolation Valves
- NW25 - NW50
- HV load lock pumping or high cycle applications
- 10,000,000 cycle rating (clean environments)
ECv Electric Bellows Vacuum Isolation Valves
- NW10 - NW25 or VCR
- Electric actuation applications (12 VDC or 24 VDC)
- 1,000,000 cycle rating (clean environments)
UHV Ultra-high Vacuum Isolation Valves
- NW25 - NW40
- Ultra-high vacuum system applications
- Metal bonnet seal limits outgassing and permeation for a lower base pressure
High Vacuum Ball Valves
- NW16 - NW100
- Designed with straight-through flow paths and less sensitive to contamination
- 2-way and 3-way ports
Jalapeño Heated Vacuum Isolation Valves
- Maintains optimal valve conductance ensuring materials don’t solidify and clog the system
- Actuator thermal barrier design improves internal thermal performance and reduces external temperature to safe touch levels
- Formed bellows-sealed poppet valve reduces particle trapping resulting in high cycle life
Heated Vacuum Isolation Ball Valves
- KF 40 and KF 50
- Designed with straight-through flow paths and less sensitive to contamination
- Designed for heated use up to 150°C
150/160 Series Bellows Vacuum Isolation Valves
- NW16 - NW160
- Designed to ensure product quality, reliability, and value
- Dual acting pneumatic operation available in select sizes
V-100 Bellows Vacuum Isolation Valves
- NW100
- Designed to ensure product quality, reliability, and value
- Spring-closed, air-open
150/160 Series Soft-start Bellows Vacuum Isolation Valves
- NW25 - NW100
- Two-stage with adjustable conductance for variable pump down speed
- Designed to ensure product quality, reliability, and value
IDA™ In Situ Diagnostic Access Isolation Valves
- NW16 or VCR
- Dual-valve design provides safe and controlled reference port access
- Multi-function capability with direct access to process chamber for leak checks
HFV High Flow, High Conductance Vacuum Valves
- Edge welded bellows provide maximum stroke length with high conductance
- Bellows-sealed poppet ensures a minimum of 1,000,000 cycles
- 304 stainless steel body, heatable to 160°C
ILP Integrated Soft-start Vacuum Isolation Valves
- NW25 - NW50
- Compact design with two valves in one compact body
- 1,000,000 cycles (clean environments)
Rapid Vacuum Isolation Valves
- NW16 - NW160
- Protects vacuum system from particles and turbulence during pump failure
- <50 to 600 msec closing time (depending on configuration)
225 Auto-Soft Flow Actuated Check Valves
- NW40 - NW50
- Operates automatically without electrical or other external power
- Reduces particulate contamination by reducing system turbulence during venting
145 Vacuum Sentry® Safety Isolation Valves
- NW25 - NW50
- Protects vacuum system from oil back streaming in the event of power failure
- Enables quick system restarts by venting the pump to atmosphere
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