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High Power Microwave Plasma System

Overview Features Resources Contact Us

High Power Microwave Plasma System

Overview Features Resources Contact Us

The High Power Microwave Plasma System features the High Power Microwave Plasma Source, generator (with isolator) and auto-tuning system comprised of the Precision Power Detector and SmartMatch® unit. This comprehensive system delivers a high concentration of radicals with low electron temperatures for the highest dissociation and lowest recombination rates.

Resources

Drawings & CADs

  • High Power Microwave Plasma System Dimensional Drawing(792.8 kB, PDF)

Literature

  • High Power Microwave Plasma System(556.5 kB, PDF)

Application Notes

  • An Effective Method for Photoresist Removal Using Microwave Plasma Ashing(1.1 MB, PDF)

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High Power Microwave Plasma Source

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