IDA™ In Situ Diagnostic Access Isolation Valves

IDA™ In Situ Diagnostic Access Isolation Valves increase the accuracy of, and reduces the time needed for, gauge or capacitance manometer zeroing and calibration during preventative maintenance intervals. They also provide a process chamber access port that enables additional functions, such as system leak checks and diagnostics. Accurate, absolute pressure measurement in-situ with the IDA valve ensures uniformity and repeatability on a system and a system-to-system basis. Process system uptime and productivity are also enhanced, and costs are reduced.

NW16 or VCR
Dual-valve design provides safe and controlled reference port access
Multi-function capability with direct access to process chamber for leak checks

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Showing 8 of 8 total products

Description	Compatibility	Body Configuration	Seal	Nose Seal	Price
IDA-LEVDiagnostic Access Valve, In Situ, Left-handed, Viton Seal, Viton Nosepiece	UNIVERSAL	Left-handed	Viton	Viton	$992
IDA-LEZDiagnostic Access Valve, In Situ, Left-handed, Chemraz Seal, Chemraz Nosepiece	UNIVERSAL	Left-handed	Chemraz	Chemraz	$1,248
IDA-LMVDiagnostic Access Valve, In Situ, Left-handed, Copper Seal, Viton Nosepiece	UNIVERSAL	Left-handed	Copper	Viton	$1,108
IDA-LMZDiagnostic Access Valve, In Situ, Left-handed, Copper Seal, Chemraz Nosepiece	UNIVERSAL	Left-handed	Copper	Chemraz	$1,278
IDA-REVDiagnostic Access Valve, In Situ, Right-handed, Viton Seal, Viton Nosepiece	UNIVERSAL	Right-handed	Viton	Viton	$992
IDA-REZDiagnostic Access Valve, In Situ, Right-handed, Chemraz Seal, Chemraz Nosepiece	UNIVERSAL	Right-handed	Chemraz	Chemraz	$1,248
IDA-RMVDiagnostic Access Valve, In Situ, Right-handed, Copper Seal, Viton Nosepiece	UNIVERSAL	Right-handed	Copper	Viton
IDA-RMZDiagnostic Access Valve, In Situ, Right-handed, Copper Seal, Chemraz Nosepiece	UNIVERSAL	Right-handed	Copper	Chemraz

Specifications

Type
Diagnostic Access Valve
Seal
Copper, Viton®, or Chemraz®
Nose Seal
Viton® or Chemraz®
Control Port Options
1/8 in. tube

Access Port
KF-NW16
Gauge Port
8 VCR® male
Chamber Port
8 VCR® female

Features

Diagnostics Access Valve Design

The IDA Valve joins a pneumatically actuated primary valve with a manually actuated secondary valve, both based on the MKS Cv Valve design. Functionally, it resembles a pair of two-way valves joined by a tee where V1 is the primary valve and V2 is the secondary valve. This configuration allows for two standard, mirror-image port orientations for your system: a left-oriented body and a rightoriented body.

Applications

The IDA™ Valve (In-situ Diagnostics Access Valve) is a multi-purpose, multi-port, dual valve designed to replace the standard isolation valve used in capacitance manometer and other types of gauge isolation in the semiconductor industry. It is an extension of the proven family of compact, high conductance modular MKS Cv™ Valves.

Gauge Operation

As shown in the Figure, with Vl open and V2 closed, the gauge operates the same as most systems having an ordinary isolation valve in series with the high accuracy manometer.

Gauge Isolation

For gauge isolation, Vl is closed as shown in the figure. In retrofitting system designs having an ordinary isolation valve, no procedural or computer software changes are required.

Gauge Diagnostics and Calibration Verification

In the figure, the gauge is isolated from the process chamber (Vl closed). Valve V2 is then opened, creating a short, high conductance access path for in-situ gauge zeroing or calibration. This can be done via a high quality leak detector/high vacuum system or a complete transportable calibration system.

System Diagnostics

As shown in the figure, both valves are open to access the process chamber in a static or dynamic process mode with the gauge enabled for various diagnostic practices. By using port F3 in this way, the need, and subsequently the cost, for another valve and port is eliminated.

Left or Right Orientations

On the x-y-z axis to the bottom left, a right-oriented valve body is shown as an example. Ports F1, F2, and F3 (process chamber, gauge, and reference/access ports, respectively) correspond to the axes as follows:

A right-oriented valve body has its three vacuum ports, F1, F2, and F3, aligned with the +x, +y, and +z axes, respectively.
A left-oriented valve body has its three vacuum ports, F1, F2, and F3, aligned with the +x, -y, and +z axes, respectively.

Accessories

Valve Seals

Description	Compatibility	Price
100008363O-Ring Seals, Viton, In Situ Diagnostic Access Valve	UNIVERSAL	$23.10
100008364O-Ring Seals, Chemraz, In Situ Diagnostic Access Valve	UNIVERSAL	$242
100008361O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, In Situ Diagnostic Access Valve	UNIVERSAL	$33
100008362O-Ring and Metal Seal Set, Chemraz Nose, Copper Bonnet, In Situ Diagnostic Access Valve	UNIVERSAL	$195

Internal Rebuild Kits

Description	Compatibility	Price
100008317Valve Rebuild Kit with Chemraz O-Rings, Pneumatic CV, IDA Valves	UNIVERSAL	$420
100004937Bypass Valve Rebuild Kit, Cv, IDA & Lopro 2-Stage Valves	UNIVERSAL	$300
100008313Valve Rebuild Kit with Chemraz O-Rings, Toggle-actuated CV, IDA Vacuum Valves	UNIVERSAL	$436
100008311Valve Rebuild Kit with Viton O-Rings, Toggle-actuated CV, IDA Vacuum Valves	UNIVERSAL	$315
100008314Valve Rebuild Kit with Chemraz & Copper Set, Pneumatic IDA Valve	UNIVERSAL	$357
100008312Valve Rebuild Kit with Viton & Copper Set, Pneumatic IDA Valves	UNIVERSAL	$315

Other Accessories

	Compare	Description	Compatibility	Drawings, CAD & Specs	Avail.	Price
		100008221Access Port Blank-off Kit, In Situ Diagnostic Access Valve	UNIVERSAL			$40
		100318801-LToggle Flange Clamp, Lanyard, NW16 Size ISO-KF Vacuum Flange, Aluminum	UNIVERSAL			$23.25