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Description
p9b pressure-insensitive 5-50,000 sccm mass flow controller P9B Mass Flow Controller, Pressure-insensitive, Multi-gas, Multi-range, 5 sccm to 50 slm

Specifications

  • Full Scale Flow Range
    5-50,000 sccm (N2 equivalent)
  • Maximum Inlet Pressure
    150 psig
  • Normal Operating Pressure Differential
    10-5000 sccm; 10-40 psid
    10000-20000 sccm; 15-40 psid
    10000-20000 sccm; 15-40 psid
    (N2 Full Scale with atmospheric pressure at the MFC outlet)
  • Proof Pressure
    1000 psig
  • Burst Pressure
    1500 psig
  • Control Range
    2% to 100% of Full Scale
  • Typical Accuracy
    ±1% of set point for 20-100% Full Scale
    ±0.2% of Full Scale for 2-20% Full Scale
  • Repeatability
    ±0.3% of Reading
  • Resolution
    0.1% of Full Scale
  • Zero Temperature Coefficient
    < 0.05% of Full Scale/°C
  • Span Temperature Coefficient
    < 0.08% of Reading/°C
  • Inlet Pressure Coefficient
    < 0.02% of Reading/psi
  • Typical Settling Time
    < 750 msec., typical above 5% Full Scale
  • Warm-up Time
    30 minutes
  • Operating Temperature
    10° to 50°C
  • Storage Humidity
    0 to 95% Relative Humidity, non-condensing
  • Storage Temperature
    -20° to 80°C
  • Temperature Display
    0 to 100°C
  • Temperature Accuracy
    ±2°C
  • Temperature Resolution
    0.1°C
  • Display
    4 digits for value, 4 characters for unit
  • Pressure Display
    0 to 100 psia
  • Pressure Readout Units
    psia, kPA
  • Pressure Accuracy
    1% Full Scale
  • Pressure Resolution
    0.1 psia
  • External Leak Integrity
    < 1 x 10-10 (scc/sec He)
  • Leak Integrity Through Closed Valve
    < 1.0% of Full Scale at 25 psig inlet to atmosphere
  • Wetted Materials
    316L S.S. VAR, 316 S.S., Elgiloy, KM-45
  • Valve Seat Material
    PTFE (Teflon)
  • Surface Finish
    10µ inch average Ra
  • Weight
    3 lbs (1.4 kg)
  • Compliance
    CE
  • Attitude Insensitivity
    0.25% of Full Scale for indicated zero, span and actual span
  • Pressure Transient
    ±5% of set point from 20 to 100% of Full Scale when subject to a 2 psi inlet pressure transient

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