Paragon® 8.0 slm NF3 Flow Intelligent Remote Plasma Source
Overview
For cleaning CVD and ALD/ALE process chambers, the Paragon remote plasma source is designed for high gas dissociation rates (> 95%) of NF3 with gas flows up to 8 slm and pressures up to 10 Torr. This leading-edge performance translates into increased process throughput and repeatable process results. The Paragon design incorporates a proprietary plasma block design with a Plasma Electrolytic Oxidation coating for low particle, long block life that delivers lower cost of ownership.
- Up to 8 slm NF flow, in a compact size enables faster clean times
- Best in Class dissociation (>95%) for efficient uniform cleaning results
- EtherCAT intelligent data reporting for faster, tighter device operation
- Compatible with O2 and NF3 mixed gases
- Proprietary PEO plasma block design offers greater process performance
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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AX7710MKS-01 Remote Plasma Source, 8 slm, NF3 Flow, Paragon |
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Specifications
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TypeAX7710MKS-01 Remote Plasma Source
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Gas Supply During Ignition100% Ar for ignition only
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Gas Supply Post IgnitionUp to 8 slm of NF3 (post ignition NF3 can be added and the Ar removed)
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NF3 Operation Reactant Output>95% dissociation across operating space, 1-10T, 1-8 slm
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O2: NF3 Mix Operation Reactant Output>95% dissociation across operating space, 1-10T, 1-8 slm
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Process Gas Feed & ExhaustInlet Gas Connection KF40
Outlet Gas Connection KF50 -
Duty Cycle2 sec on time minimum to 100% (process times >45 minutes)
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Gas FlowDuring Ignition: 1 to 8 Torr @ 1 to 5 slm for Ar
Post Ignition: 1 to 10 Torr @ 1 to 8 slm for NF3
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Wetted MaterialsPEO coating, 6061-T6 Aluminum, Chemraz®, Alumina
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Operating TemperatureAmbient air 40°C max.
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Cooling Water Required2.0 gpm, <30°C
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Control InterfaceEtherCAT and analog I/O 25 pin D
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Power Requirements208 VAC, 50/60 Hz, 35A, 3 phase (50A Service recommended)
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Dimensions18.40 x 9.50 x 10.50 inches (467 x 241 x 267 mm nominal)
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Weight54 lb. (24.5 Kg)
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ComplianceCE, SEMI F47, SEMI S2 (includes S8, S10, S14 assessments), UL 61010-1, CAN/CSA-61010-1
Features
Resources
Application Notes
- ASTRON® Remote Plasma Source: Atomic Fluorine Transport (319.7 kB, PDF)
- Best Practice for Integration of the ASTRON® Remote Plasma Source (438.5 kB, PDF)
- Optimized Block Coating for Paragon Remote Plasma Source (229.8 kB, PDF)
- ASTRON® Remote Plasma Source Ignition Best Practices (394 kB, PDF)
Drawings & CADs
- Paragon AX7710MKS-01 Dimensional Drawing (224.6 kB, PDF)
Ultra-High Velocity