PDPCA Dual-zone Pressure Controllers with Mass Flow Meter
Overview
The P-Series Dual-Zone Pressure Controller (PDPCA) is a highly integrated closed-loop pressure control subsystem. It consists of an inlet pneumatic shut-off valve, two independent channels of pressure control with mass flow metering, and a vacuum outlet. The pressure control channels consist of two P-Series pressure controllers (PPCMA). Each PPCMA provides both pressure control and flow metering.
- Available with EtherCAT® or DeviceNet™ communications
- Less plumbing and cabling required
- Pressure measurement accuracy of ±0.5% of set point
Products
Configuration Options
The following options are available for PDPCA Dual-Zone Pressure Controllers
Ordering Code Example: PDPCA51T12810
| Configuration Option | Option Code |
|---|---|
|
PDPCA Dual-Zone Pressure Controller with MFM |
PDPCA |
Pressure Range Full Scale |
|
| 20 Torr | 21T |
| 50 Torr | 51T |
| 100 Torr | 12T |
Full Scale Flow Rate |
|
| 20 sccm | 21C |
| 50 sccm | 51C |
| 100 sccm | 12C |
Unit Configuration |
|
| EtherCAT | 8 |
| DeviceNet | 6 |
Firmware Revision |
|
| EtherCAT Version | 10 |
| DeviceNet Version | 10 |
Gas and Bleed Flow Rate |
(Consult Applications Engineering) |
Specifications
-
TypeDual Pressure Controller
-
Pressure Range20, 50, or 100 Torr, Full Scale
-
Fitting TypeSwagelok® 4 VCR® male compatible
-
Pressure Control Accuracy±1.0% set point1
-
Transducer Over Pressure Limit45 psia or 200% Full Scale, whichever is greater
-
Pressure Measurement Accuracy±0.5% Reading
-
Zero Temperature CoefficientPressure: <0.02% Full Scale/°C
Flow: <0.05% Full Scale/°C -
Span Temperature CoefficientPressure: <0.04% Reading/°C
Flow: <0.08% Reading/°C -
Control Range10-100% Full Scale
-
Typical Response Time<2.0 seconds to set point, typical - dependent on system configuration and control settings
-
Operating Temperature15-50°C (59-122°F)
-
Storage Temperature-20 to 80°C (-4 to 176°F)
-
Storage Humidity0-95% Relative Humidity, non-condensing
-
External Leak Integrity<10-9 scc/sec He
-
Leak Integrity Through Closed Valve<1% Full Scale
-
Flow Measurement Range20, 50 or 100 sccm, Full Scale
-
Maximum Inlet Pressure45 psia
-
Flow Accuracy±1.0% Full Scale
-
Wetted Materials316L Stainless Steel, Inconel®, Nickel, Elgiloy®, Viton®
-
Surface FinishRa <10 µinches, electropolished
-
Input PowerEtherCAT: +24 VDC (<5 watts)
DeviceNet: +11 to 25 VDC (<4 watts), each channel -
ConnectorEtherCAT: 2 x RJ-45 (comm.) male, M8 male, 5 pin (power)
DeviceNet: M8, 5 pin micro connector (Power and Communications), each channel -
Data Rate SwitchEtherCAT: No switch
DeviceNet: 4 positions: 125, 250, 500K (Default), Programmable over network. -
EtherCAT Communication Rate100 Mbps
-
DeviceNet Communication RateN/A
-
MAC ID SwitchesEtherCAT: 3 switches, 16 positions
DeviceNet: 2 switches, 10 positions: 0,0 to 6,3. 1 to 254 -
Network SizeEtherCAT: Up to 4095 nodes
DeviceNet: Up to 64 nodes -
IndicatorsEtherCAT: Up to 4095 nodes
DeviceNet: LED Network (green/red); LED Module (green/red) -
Meter Warm-up Time1 hour
-
Stability at set point<0.1% set point
-
Weight10.5 lbs. (4.8 Kg)
-
Dimensions10.46 (incl. fittings) x 3.36 x 5.35 in.
26.56 (incl. fittings) x 8.53 x 13.59 cm
Features
Resources
Literature
- PDPCA P-Series Dual-Zone EtherCAT® Pressure Controller (2 MB, PDF)
- PDPCA P-Series Dual-Zone DeviceNet Pressure Controller (2.1 MB, PDF)
Manuals
- PDPCA Dual Zone Pressure Controller Manual (1.1 MB, PDF)
- PDPCA Dual Zone Pressure Controller EtherCAT Supplement (584.5 kB, PDF)
- PDPCA Dual Zone Pressure Controller DeviceNet Supplement (750.3 kB, PDF)
Drawings & CADs
- PPDPCA 4VCR EtherCAT STEP File (4.2 MB, ZIP)
- PDPCA EtherCAT Dimensional Drawing (454.7 kB, PDF)
Device Description Files
- PDPCA EtherCAT ESI File (242.4 kB, XML)
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