AX8585 Stand-Alone High Concentration Ozone Delivery System
Overview
The AX8585 stand-alone ozone gas delivery system is designed around the AX8410 PRIME ozone generator to provide high concentration, ultra clean ozone generation and delivery. This fully configurable product line is designed to meet the ever changing needs of the semiconductor industry. Each AX8585 is a fully integrated, high output ozone gas delivery system intended for use in an increasing number of semiconductor process applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth. The system can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. Flow rates of up to 200 slm and concentrations up to 375 g/Nm3 can be achieved depending on the configuration of the system.
- Fully integrated Delivery system allows for fast, easy installation and quick start up with minimum connections required
- Supports single or multiple process tools for maximum efficiency and lower cost of operation
- Modular design allows each channel to be process matched for maximum flexibility
- Closed-loop concentration control provides tighter process control for higher yields
- User friendly controller with touch screen provides easy, central controls for interfacing with the tool, setting ozone concentration and flow rate, and safety monitoring
- Provides concentrations up to 375 g/Nm3 at higher flow rates to meet newer process requirements
- Reduces oxidation time and increases throughput
Products
Specifications
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TypeOzone Gas Delivery System
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Ozone Output375g/Nm3
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Flow Rate22.7 lpm (6.0 gpm) per generator
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Feed GasOxygen, Nitrogen (100 - 1000 ppm of total flow)
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Feed Gas Supply PressureO2 pressure 55 ±2 psig (379 ±13.5 kPa, 3.8 ±0.14 kg/cm2), N2 pressure 60 ±2 psig (413 ±13.5 kPa, 4.12 ±0.14 kg/cm2)
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Feed Gas PurityOxygen: Grade 6 or better O2, Nitrogen: Grade 5 or better N2
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Operating Temperature5 - 40°C (41 - 104°F)
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Cooling Water Temperature Required5 - 25°C (41 - 77°F)
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Cooling Water Filtration Required100 microns
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Cooling Water Quality Required3 - 0.5 MΩcm DI
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Cooling Water Minimum Flow Required22.7 lpm (6.0 gpm) per generator (configuration dependent)
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Cooling Water Connections Required1 in. compression (Swagelok®)
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Cooling Water Heat Load Required11 kw per generator
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Voltage Requirements208 volts AC (±10%), three phase
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Frequency50/60 Hz
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Exhaust Flow Rate70.8 l/s (150 cfm) per generator
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Exhaust TypeSEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
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Exhaust Static Pressure3.05 mm (0.16 in) H2O minimum, measured at duct entrance to cabinet
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Control Air Pressure70 - 100 psig (483 - 689 kPa)
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Control Air TypeCDA or dry nitrogen, 40µ filtered
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Control Air Fitting0.25 in. compression (Swagelok®)
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Exhaust Connection8 in. diameter duct opening
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Dimensions28.4 x 81.7 x 41.4 in. (722 x 2074 x 1051 mm) (width x height x depth)
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Relative Humidity30 - 90% (non - condensing)
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Weight345 kg (760 lb) for system with one generator
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ComplianceCE, UL/CSA, SEMI S2, SEMI F47
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AltitudeUp to 1000 m (3280 ft) above mean sea level
Features
Resources
Literature
- AX8585 Stand-alone High Concentration Ozone Delivery System (683.4 kB, PDF)
Drawings & CADs
- AX8585 Ozone Delivery System Dimensional Drawing (522.1 kB, PDF)
Application Notes
- Ozone Data Conversion Tables (289.1 kB, PDF)
Ultra-High Velocity