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Ozone Gas Delivery Systems
MKS ozone gas delivery systems provide field-proven, high concentration, ultra-clean ozone generation for advanced thin film applications such as Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), Tetraethyl Orthosilicate (TEOS)/Ozone CVD (HDSACVD), contaminant removal and oxide growth. Gas delivery models have integrated ozone concentration monitoring, flow control, and power distribution. Additional system options include safety monitoring, status indicators and ozone destruction capability.
AX8575 Stand-Alone High Flow, High Concentration Ozone Delivery System
- Concentrations up to 350g/Nm3 at higher flow rates to meet new process requirements.
- Fast & easy installation with minimal connections.
- Supports single or multiple process tools for efficiency and lower cost of operation.
AX8580 Fully Integrated Modular Ozone Delivery System
- Fully integrated, modular system equipped with up to (4) AX8415 generators for the highest concentration at the highest flow
- Individually controlled generator outputs support up to (4) channels or combined into a single channel chamber process tool
- Highest ozone concentrations >400g/Nm3 at the highest flow rates for improved thin film quality
AX8585 Stand-Alone High Concentration Ozone Delivery System
- Fully integrated Delivery system allows for fast, easy installation and quick start up with minimum connections required
- Supports single or multiple process tools for maximum efficiency and lower cost of operation
- Modular design allows each channel to be process matched for maximum flexibility
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