UHV Ultra-high Vacuum Isolation Valves
Overview
UHV Ultra-high Vacuum Isolation Valves are lightweight and have a compact profile, enabling it to fit easily into vacuum systems where space is tight. MKS has optimized the welded stainless steel bellows stroke length to ensure a long cycle life while maintaining high conductance.
- NW25 - NW40
- Ultra-high vacuum system applications
- Metal bonnet seal limits outgassing and permeation for a lower base pressure
- Spring-to-close, air-to-open pneumatic valve
Products
| Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|
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UHV Isolation Valve, NW25, 2.75 in., Angle Ports, Viton/Copper, Pneumatic
$737
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UHV-25-ACC-ELVN VLV,UHV-25,ACCE,L,VN UHV Isolation Valve, NW25, 2.75 in., Angle Ports, Viton/Copper, Pneumatic |
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$737 |
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UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Pneumatic
$788
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UHV-40-ACC-ELVN ULTRA HIGH VACUUM VALVE UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Pneumatic |
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$788 |
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UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Manual
$615
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UHV-40-ACC-EMVM ULTRA HIGH VACUUM VALVE UHV Isolation Valve, NW40, 2.75 in. CF, Angle Ports, Viton/Copper, Manual |
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$615 |
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UHV Isolation Valve, NW40, 2.75 in. CF, Inline Ports, Viton/Copper, Pneumatic
$875
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UHV-40-ICC-ELVN UHV Isolation Valve, NW40, 2.75 in. CF, Inline Ports, Viton/Copper, Pneumatic |
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$875 |
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Configuration Options
Please see the UHV Valve datasheet for available product options.
Specifications
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TypeUltra-high Vacuum Valve
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Vacuum RangeAtmosphere to 10-9 Torr
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Body ConfigurationOffset Inline
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Port SizeNW25, NW40
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Flange SizeISO-KF 25, ISO-KF 40, CF 2.75 in. depending on configuration
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Flange TypeISO-KF, CF, or Tube
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ActuationManual or Pneumatic
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Limit SwitchOptional
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SealViton
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Bonnet SealCopper or Viton
Features
Accessories
Replacement Solenoids
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
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100008163 Solenoid Valve, Replacement, 24 VDC, 7 Watt | $168 |
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100008165 Replacement Solenoid Valve, 120 VAC, 50-60 Hz, 7.5 Watt |
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$221 |
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100008164 Solenoid Valve, Replacement, 24 VAC, 50-60 Hz, 6 Watt |
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$210 |
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100008167 Solenoid Valve, Replacement, 220-240 VAC, 50-60 Hz, 7.5 Watt |
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$180 |
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100008166 Solenoid Valve, Replacement, 208 VAC, 50-60 Hz, 7.5 Watt |
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$145 |
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100008539 Solenoid Valve, Replacement, 12 VDC, 7 Watt |
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$105 |
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Valve Seals
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
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100010361 O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, UHV Valve, NW25 Port | $51 |
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100010362 O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, UHV Pneumatic Valve, NW40 Port | $41 |
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100010363 O-Ring and Metal Seal Set, Viton Nose, Copper Bonnet, UHV Manual Valve, NW40 Port | $22 |
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100011771 O-Ring Seals, Viton, UHV Valve, NW25 Port | $59 |
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100011772 O-Ring Seals, Viton, Pneumatic UHV Valve, NW40 Port | $52 |
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100011773 O-Ring Seals, Viton, Manual UHV Valve, NW40 Port | $57 |
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Internal Rebuild Kits
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | |||
|---|---|---|---|---|---|---|---|
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100011774 Valve Rebuild Kit with Viton Seal Set, Pneumatic UHV Valves, NW25 | $500 |
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100002652 Pneumatic Valve Rebuild Kit, Viton Nose, Copper Bonnet, UHV Valve, NW25 | $431 |
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100009979 Valve Rebuild Kit, Viton Nose, Copper Bonnet, Manual UHV Valves, NW40 | $483 |
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100009978 Valve Rebuild Kit, Viton Nose, Copper Bonnet, Pneumatic UHV Valves, NW40 | $595 |
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100011775 Valve Rebuild Kit with Viton Seal Set, Pneumatic UHV Valves, NW40 | $656 |
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100011776 Valve Rebuild Kit with Viton Seal Set, Manual UHV Valves, NW40 | $610 |
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Resources
Literature
- Ultra High Vacuum Valves (512.1 kB, PDF)
Manuals
- UHV Valve Manual (675.8 kB, PDF)
Ultra-High Velocity