UHV Ultra-high Vacuum Isolation Valves are lightweight and have a compact profile, enabling it to fit easily into vacuum systems where space is tight. MKS has optimized the welded stainless steel bellows stroke length to ensure a long cycle life while maintaining high conductance.
Features
TIG Fusion-welded body
Another standard feature is a TIG fusion-welded body made of high grade, corrosion resistant 304 stainless steel for significantly fewer entrapment areas, resulting in less contaminants. The body is available with a choice of bead blasted or electropolished finishes.
UHV Applications
The UHV Valve is a compact vacuum valve designed for use in ultra-high vacuum systems, for physical vapor deposition, high energy physics, mass spectrometry and other applications that require an ultraclean environment.
Accessories
Replacement Solenoids
Valve Seals
Limit Switches
Internal Rebuild Kits
Resources
Literature
Ultra High Vacuum Valves(512.1 kB, PDF)
Manuals
UHV Valve Manual(675.8 kB, PDF)