Specifications

  • Full Scale Flow Range
    200 slm
  • Minimum Controllable Flow
    0.1% of Full Scale
  • Closed Conductance Leakage
    <0.1% of Full Scale
  • Exposed Materials
    316 stainless steel, Nickel, Viton
  • Seal Material
    Viton
  • Fitting Type
    0.5 in. Swagelok
  • Operating Temperature
    -10 - 60°C

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