1179C General Purpose, Elastomer Sealed 10-20,000 sccm Mass Flow Controller
Model: 1179C01321CS1BV
1179C General Purpose, Elastomer Sealed 10-20,000 sccm Mass Flow Controller
Model: 1179C01321CS1BV
Overview
Overview
The 1179C01321CS1BV is a general purpose mass flow controller with an Viton seal, rated for 20 sccm Full Scale (N2), with a 0.25 inch tube connection and a 15-pin D-sub electrical connector. It is designed to measure and control the flow of gases in a wide variety of applications. 1179 Mass-Flo® controllers can also be used as a pressure controller when connected to a suitable pressure transducer. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.
Technical Specs
- TypeMass Flow Controller
- Calibration GasN2 (or equivalent)
- Control Range0.4 - 20 sccm
- Full Scale Flow Range20 sccm
- Fitting Type0.25 in. tube
- Flow Input Output Signal0 - 5 VDC
- Analog I/O Connector15-pin D-sub
- Seal MaterialViton
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid (with atmospheric pressure at the MFC outlet)
- Typical Accuracy±1.0% of Full Scale (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
- Repeatability<0.05% of Full Scale/°C
- Resolution<0.08% of Reading/°C
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time<2 sec (per SEMI Guideline E17-91)
- Operating Temperature0 - 50°C
- Set Point Command Signal0 - 5 VDC from <20 kOhm
- Wetted Materials316L stainless steel, Viton®, nickel
- External Leak Integrity<1 x 10-9
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.)
- ComplianceCE
- Maximum Current Required at Start-up±15 VDC (±5%) @ 200 mA
- Typical Current Required at Steady State±15 VDC (±5%) @ 100 mA
- Valve StateNormally closed
Technical Specs
- TypeMass Flow Controller
- Calibration GasN2 (or equivalent)
- Control Range0.4 - 20 sccm
- Full Scale Flow Range20 sccm
- Fitting Type0.25 in. tube
- Flow Input Output Signal0 - 5 VDC
- Analog I/O Connector15-pin D-sub
- Seal MaterialViton
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 - 40 psid (with atmospheric pressure at the MFC outlet)
- Typical Accuracy±1.0% of Full Scale (including non - linearity, hysteresis, and non - repeatability referenced to 760 mmHg and 0°C)
- Repeatability<0.05% of Full Scale/°C
- Resolution<0.08% of Reading/°C
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
- Typical Settling Time<2 sec (per SEMI Guideline E17-91)
- Operating Temperature0 - 50°C
- Set Point Command Signal0 - 5 VDC from <20 kOhm
- Wetted Materials316L stainless steel, Viton®, nickel
- External Leak Integrity<1 x 10-9
- Leak Integrity Through Closed Valve<1.0% of Full Scale at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is recommended.)
- ComplianceCE
- Maximum Current Required at Start-up±15 VDC (±5%) @ 200 mA
- Typical Current Required at Steady State±15 VDC (±5%) @ 100 mA
- Valve StateNormally closed
Resources & Downloads
Drawings & CADs
1179C Dimensional Drawing(54.6 kB, PDF)