General Purpose 10 to 20,000 sccm Mass Flow Controller with Elastomer Seals

The 1179C is a general purpose mass flow controller designed to measure and control the flow of gases in a wide variety of applications. The 1179 Mass-Flo® controllers are available with Full Scale ranges from 10 sccm to 20 slm, providing fast, repeatable flow control to as low as 0.2 sccm. It can also be used as a pressure controller when connected to a suitable pressure transducer.

Flow ranges from 10 sccm to 20 slm
Patented sensor design provides exceptional zero stability
Fast warm-up time minimizes expensive production downtime
Compatible with earlier MKS MFC and power supply/readout modules

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Showing 10 of 22 total products

Description	Compatibility	Full Scale Flow Range	Seal Material	Fitting Type	Price
1179C01311CR1BVMass Flow Controller, 10 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	10 sccm	Viton	4 VCR male	$1,521
1179C01311CS1BVMass Flow Controller, 10 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	10 sccm	Viton	0.25 in. tube	$1,521
1179C01312CR1BVMass Flow Controller, 100 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	100 sccm	Viton	4 VCR male	$1,521
1179C01312CS1BVMass Flow Controller, 100 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	100 sccm	Viton	0.25 in. tube	$1,521
1179C01313CR1BVMass Flow Controller, 1000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1000 sccm	Viton	4 VCR male	$1,521
1179C01313CS1BVMass Flow Controller, 1000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	1000 sccm	Viton	0.25 in. tube	$1,521
1179C01314CR1BVMass Flow Controller, 10,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	10000 sccm	Viton	4 VCR male	$1,521
1179C01314CS1BVMass Flow Controller, 10,000 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	10000 sccm	Viton	0.25 in. tube	$1,521
1179C01321CR1BVMass Flow Controller, 20 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	20 sccm	Viton	4 VCR male	$1,521
1179C01321CS1BVMass Flow Controller, 20 sccm, 0.25 in. Tube, 0-5 VDC, DB15, Viton Seal	UNIVERSAL	20 sccm	Viton	0.25 in. tube	$1,521

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Configuration Options

Please see the 1179C datasheet for product options.

	Description
	1179C Mass Flow Controller, Elastomer Seal, 10 - 20,000 sccm

Specifications

Control Range
2% to 100% of Full Scale
Full Scale Flow Range
10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type
Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼" Swagelok®
Analog I/O Connector
9-pin or 15-pin Type "D"
Seal Material
Buna-N, Neoprene®, Kalrez®
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
10 to 40 psid (10 to 5000 sccm)
15 to 40 psid (10000 to 30000 sccm)
(with atmospheric pressure at the MFC outlet)
Typical Accuracy
±1.0% of Full Scale
Repeatability
±0.2% of Full Scale
Resolution
0.1% of Full Scale
Zero Temperature Coefficient
<0.05% of Full Scale/°C

Span Temperature Coefficient
<0.08% of Reading./°C
Pressure Coefficient
<0.02% of Reading/psi
Warm-up Time
2 minutes
Typical Settling Time
<2 sec
Operating Temperature
0° to 50°C
Power Requirements
±15 VDC (200 mA start-up, 100 mA steady-state)
Set Point Command Signal
0 to 5 VDC from <20K Ω
Wetted Materials
316L S.S., Viton®, nickel
External Leak Integrity
< 1 x 10^-9
Leak Integrity Through Closed Valve
<1.0% of Full Scale at 40 psig inlet to atmosphere
Compliance
CE

Features

Form-Fit-Function Replacement MFC

The 1179C is a direct form-fit-function replacement for the most common MFCs on the market today. The standard 3-inch footprint enables the 1179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with the same pin-outs, signals, and functions as their industry counterparts, so no cable or connector rewiring is necessary. The 1179C is compatible with MFC power supply and display electronics from MKS or other manufacturers.

Performance and Reliability

Performance and reliability have been designed into the 1179C, and ensured through rigorous MTBF analysis and extensive STRIFE testing. The 1179C complies with IEC-801 specifications for tolerance to ESD (electro static discharge) and RFI (radio frequency interference) environments. Zero and span drift are minimal with MKS’s new patented sensor, as shown by the graph below. The 1179C also complies with European CE Mark requirements. As a statement of our confidence in the performance of the 1179C, it carries a two-year warranty.

Accessories

Description	Compatibility	Price
CB259-5-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	$179
CB147-12-10Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	$93
CB147-1-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	$137
100016745Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft.	UNIVERSAL	$160
100016744Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft.	UNIVERSAL	$104
100016746Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft.	UNIVERSAL	$276
100019087Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft.	UNIVERSAL	$117
100019088Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft.	UNIVERSAL	$186
100019089Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft.	UNIVERSAL	$511
RCBDMFC-3-10Cable, Mass Flow Controller, RoHS, DB9, 10 ft.	UNIVERSAL	$222
RCBDMFC-1-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	$158
RCBDMFC-4-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	$244

Resources

General Purpose 10 to 20,000 sccm Mass Flow Controller with Elastomer Seals

General Purpose 10 to 20,000 sccm Mass Flow Controller with Elastomer Seals

Configuration Options

Specifications

Features

Form-Fit-Function Replacement MFC

Performance and Reliability

Accessories

Resources

Literature

Manuals

Drawings & CADs

Application Notes

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