179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters
Model: 179C01314CS3BM
179C General Purpose Metal-Sealed 10-20,000 sccm Mass Flow Meters
Model: 179C01314CS3BM
Overview
Overview
The 179C01314CS3BM is a general purpose mass flow meter with a metal seal, rated for 10,000 sccm Full Scale (N2), with 0.25 inch tubes and a 15-Pin type D connector. It provides fast, repeatable flow metering and is a direct form-fit-function replacement for the most common MFMs on the market today. The standard 3-inch footprint enables the 179C to drop directly into the same space without modifying existing gas lines.
Technical Specs
- TypeMass Flow Meter
- Calibration GasN2 (or equivalent)
- Full Scale Flow Range10000 sccm
- Fitting Type0.25 in. tube
- Analog I/O Connector15-pin D-sub
- Seal MaterialMetal
- Maximum Inlet Pressure500 psig
- Normal Operating Pressure Differential10 Torr
- Typical Accuracy±1.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature0 - 50°C
- Wetted Materials316L stainless steel
- External Leak Integrity<1 x 10-9
- ComplianceCE
- Typical Current Required at Steady State±15 VDC (±5%) @ 150 mA
- Digital I/O Level of Filtering±15 VDC (±5%) @ 50 mA
- Valve State<0.02% of Reading/psi
Technical Specs
- TypeMass Flow Meter
- Calibration GasN2 (or equivalent)
- Full Scale Flow Range10000 sccm
- Fitting Type0.25 in. tube
- Analog I/O Connector15-pin D-sub
- Seal MaterialMetal
- Maximum Inlet Pressure500 psig
- Normal Operating Pressure Differential10 Torr
- Typical Accuracy±1.0% of Full Scale
- Repeatability±0.2% of Full Scale
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Warm-up Time<2 min (to within 0.2% of Full Scale of steady state performance)
- Operating Temperature0 - 50°C
- Wetted Materials316L stainless steel
- External Leak Integrity<1 x 10-9
- ComplianceCE
- Typical Current Required at Steady State±15 VDC (±5%) @ 150 mA
- Digital I/O Level of Filtering±15 VDC (±5%) @ 50 mA
- Valve State<0.02% of Reading/psi
Resources & Downloads
Literature
179C All-Metal Mass Flo® Mass Flow Meter, 10 sccm - 20 slm(231.2 kB, PDF)