General Purpose Metal-Sealed 10 sccm to 20 slm Mass Flow Meter

The 179 is an all-metal mass flow meter designed to measure the flow of gases in a wide variety of applications. 179 Mass-Flo® meters are available with Full Scales from 10 sccm to 20 slm, providing fast, repeatable flow metering to as low as 0.1 sccm. The 179 is a direct form-fit-function replacement for the most common MFMs on the market today.

Flow ranges from 10 sccm to 20 slm
Patented sensor design provides exceptional zero stability
Percent of Full Scale accuracy for analog configurations

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Showing 10 of 22 total products

Description	Compatibility	Full Scale Flow Range	Fitting Type	Analog I/O Connector	Price
179C01311CR3BMMass Flow Meter, 10 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	10 sccm	4 VCR male	15-pin D-sub	$1,217
179C01311CS3BMMass Flow Meter, 10 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	10 sccm	0.25 in. tube	15-pin D-sub	$1,217
179C01312CR3BMMass Flow Meter, 100 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	100 sccm	4 VCR male	15-pin D-sub	$1,217
179C01312CS3BMMass Flow Meter, 100 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	100 sccm	0.25 in. tube	15-pin D-sub	$1,217
179C01313CR3BMMass Flow Meter, 1000 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	1000 sccm	4 VCR male	15-pin D-sub	$1,217
179C01313CS3BMMass Flow Meter, 1000 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	1000 sccm	0.25 in. tube	15-pin D-sub	$1,217
179C01314CR3BMMass Flow Meter, 10,000 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	10000 sccm	4 VCR male	15-pin D-sub	$1,217
179C01314CS3BMMass Flow Meter, 10,000 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	10000 sccm	0.25 in. tube	15-pin D-sub	$1,217
179C01321CR3BMMass Flow Meter, 20 sccm, 4 VCR Male, DB15, Metal Seal	UNIVERSAL	20 sccm	4 VCR male	15-pin D-sub	$1,217
179C01321CS3BMMass Flow Meter, 20 sccm, 0.25 in. Tube, DB15, Metal Seal	UNIVERSAL	20 sccm	0.25 in. tube	15-pin D-sub	$1,217

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Configuration Options

Please see the 179C datasheet for product options.

	Description
	179C Mass Flow Meter, Metal Seal, 10 - 20,000 sccm

Specifications

Type
Mass Flow Meter
Full Scale Flow Range
10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000 sccm (N2 equivalent)
Fitting Type
Swagelok® 4 VCR®, Swagelok 4 VCO®, ¼ inch Swagelok®
Analog I/O Connector
9-pin or 15-pin Type "D"
Maximum Inlet Pressure
500 psig
Normal Operating Pressure Differential
10 Torr at 10 to 20,000 sccm (with atmospheric pressure at the MFM outlet)
Typical Accuracy
±1.0% of Full Scale
Repeatability
±0.2% of Full Scale
Resolution
0.1% of Full Scale

Zero Temperature Coefficient
<0.05% of Full Scale/°C
Span Temperature Coefficient
<0.08% of Reading./°C
Pressure Coefficient
<0.02% of Reading/psi
Warm-up Time
2 minutes
Operating Temperature
0° to 50°C
Power Requirements
±15 VDC (150 mA start-up, 50 mA steady-state)
Wetted Materials
316L S.S.
External Leak Integrity
< 1 x 10^-9
Compliance
CE

Features

Direct Form-Fit-Function Replacement

The 179C is a direct form-fit-function replacement for the most common MFM’s on the market today. The standard 3-inch footprint enables the 179C to drop directly into the same space without modifying existing gas lines. Electrical connectors are the same Type “D” connectors, with similar pin-outs, signals, and functions as their industry counterparts. The 179C is compatible with mass flow controller (MFC) power supply and display electronics from MKS or other manufacturers.

Performance and Reliability

Performance and reliability have been designed into the 179C, and ensured through rigorous MTBF analysis and extensive STRIFE testing, which includes humidity soak and temperature cycling. The 179C MFM also complies with European CE Mark requirements. Zero and span drift are minimal with MKS’ new patented sensor, as shown by the graph below. As a statement of our confidence in the performance of the 179C, it carries a two-year warranty

Accessories

Description	Compatibility	Price
CB147-12-10Cable, Mass Flow Controller, DB9, 10 ft.	UNIVERSAL	$93
CB147-1-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, DB15, 10 ft.	UNIVERSAL	$137
CB259-5-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, DB15, 10 ft.	UNIVERSAL	$179
100016744Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 10 ft.	UNIVERSAL	$104
100019087Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 10 ft.	UNIVERSAL	$117
100016745Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 25 ft.	UNIVERSAL	$160
100016746Cable, Mass Flow Controller, 946 Controller, DB15 to HD15, 50 ft.	UNIVERSAL	$276
RCBDMFC-1-10Cable, Mass Flow Controller, 246, 247 or 660 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	$158
100019089Mass Flow Controller Cable, 946 Controller, DB9 to HD15, 50 ft.	UNIVERSAL	$511
100019088Cable, Mass Flow Controller, 946 Controller, DB9 to HD15, 25 ft.	UNIVERSAL	$186
RCBDMFC-3-10Cable, Mass Flow Controller, RoHS, DB9, 10 ft.	UNIVERSAL	$222
RCBDMFC-4-10Cable, Mass Flow Controller, PR4000, 146, 167, 186 or 647 Controllers, RoHS, DB15, 10 ft.	UNIVERSAL	$244
RCB147-7-10Mass Flow Meter Cable, PR4000 Controller to 20-pin Card Edge Meters, 10 ft.	UNIVERSAL
RCB147-12-10Mass Flow Meter Cable, PR4000 Controller to DB9 Mass Flow Meters, 10 ft.	UNIVERSAL
RCB147-1-10Mass Flow Meter Cable, PR4000 Controller to DB15 Mass Flow Meters, 10 ft.	UNIVERSAL	$294

Resources

General Purpose Metal-Sealed 10 sccm to 20 slm Mass Flow Meter

General Purpose Metal-Sealed 10 sccm to 20 slm Mass Flow Meter

Configuration Options

Specifications

Features

Direct Form-Fit-Function Replacement

Performance and Reliability

Accessories

Resources

Literature

Manuals

Drawings & CADs

Application Notes

Related Products

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GM50A/GM51A Metal-sealed 5-50,000 sccm Mass Flow Controllers

MKS Automation Platform