AX8580 Ozone Delivery System

Type

Ozone Gas Delivery System
Ozone Output

>400g/Nm³
Flow Rate

2.5 gpm per generator
Feed Gas

Oxygen, Nitrogen
Feed Gas Supply Pressure

70 ±2 psig (483 ±13.5 kPa, 4.92 ±0.14 kg/cm²) nominal, 80 ±2 psig (551 ±13.5 kPa, 5.62 ±0.14 kg/cm²) maximum N2 pressure 10 psi higher than O2 pressure
Feed Gas Purity

99.9995% minimum
Operating Temperature

5 - 40°C (41 - 104°F)
Cooling Water Temperature Required

5 - 17°C
Cooling Water Filtration Required

100 microns
Cooling Water Quality Required

1 - 3 MΩcm DI
Cooling Water Minimum Flow Required

2.5 gpm per generator
Cooling Water Connections Required

1 in. compression (Swagelok®)
Cooling Water Heat Load Required

5 kw per generator
Voltage Requirements

208 volts AC (±10%), three phase

Current Requirements

65 Amps max (fully populated system)
Frequency

50/60 Hz
Exhaust Flow Rate

Two-generator system requires 125 CFM (3.5m³/min), Four-generator system requires 250 CFM (7m³/min), Static Pressure 125CFM (3.5m³/min) requires 0.1 in. H20 minimum (25 Pa), measured 3 ft inside the customer provided exhaust air duct, 250 CFM (7m³/min)
Exhaust Type

SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
Exhaust Static Pressure

0.07 in. H20 minimum (17.4 Pa), measured at duct entrance to cabinet
Control Air Pressure

70 - 100 psig (483 - 689 kPa)
Control Air Type

CDA or dry nitrogen, 40µ filtered
Control Air Fitting

0.25 in. compression (Swagelok®)
Exhaust Connection

6 in. diameter duct opening standard
Dimensions

26 x 82 x 38 in. (661 x 2083 x 965 mm) (width x height x depth)
Relative Humidity

30 - 90% (non - condensing)
Weight

705 lbs (320 Kg) for system with one generator 1 channel and BMT safety monitor, 1015 lbs (461 Kg) for system with four generator 1 channel and BMT safety monitor, 1045 lbs (480 Kg) for system with two generator 1 channel and BMT safety monitor and chiller
Compliance

ETL 9700614, SEMI S2-0715
Altitude

Up to 1000 m (3280 ft) above mean sea level