e-Vision 2 General Purpose Residual Gas Analyzer
Overview
- Leak detection of vacuum lines, welds and seals
- Vacuum diagnostics
- Pump down monitoring
- Chamber bake out monitoring
- Leak checking of coolant lines within a vacuum chamber
- Chamber contaminant monitoring
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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EV2-110-000FT Residual Gas Analyzer, 1-100 amu, Faraday Detector, Open Ion Source |
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$5,460.00 |
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Residual Gas Analyzer, 1-100 amu, Multichannel Plate Dual Detector, Open Ion Source
$6,946.00
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EV2-120-000FT Residual Gas Analyzer, 1-100 amu, Multichannel Plate Dual Detector, Open Ion Source | $6,946.00 |
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EV2-210-000FT Residual Gas Analyzer, 1-200 amu, Faraday Detector, Open Ion Source | $6,368.00 |
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Residual Gas Analyzer, 1-200 amu, Multichannel Plate Dual Detector, Open Ion Source, Tungsten Filaments
$8,297.00
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EV2-220-000FT Residual Gas Analyzer, 1-200 amu, Multichannel Plate Dual Detector, Open Ion Source, Tungsten Filaments |
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$8,297.00 |
|
Configuration Options
e-Vision 2 General Purpose Residual Gas Analyzers are also available with the following options.
Ordering Code Example: EV2-120-000
| Configuration Option | Option Code |
|---|---|
|
e-Vision 2 Residual Gas Analyzer |
EV |
Software Option |
|
| Web Application Only | 2 |
| EasyView | E |
Mass Range |
|
| 100 amu | 1 |
| 200 amu | 2 |
Detector Type |
|
| Faraday Only | 1 |
| Multichannel Plate Dual | 2 |
Reserved |
|
| Reserved | 0-00 |
Filament |
|
| Tungsten Filaments | 0 |
| Thoria Coated Iridium | 1 |
Specifications
-
TypeResidual Gas Analyzer
-
Measurement TechniqueMass Spectrometry
-
Mass Range1-100 or 1-200 amu
-
FilamentsTungsten or Thoria Coated Iridium
-
SoftwareBuilt-in web applications allowing RGA control and data acquisition without installed software using web browser on any PC
Optional Easy View Software available -
Filter length4 in. (100 mm)
-
Maximum Analyzer Operating Pressure1e-4 Torr (1.3e-4 mbar)
-
Ion Source Sensitivity2e-4 A/mbar
-
Minimum Detectable Concentration2e-11 Torr (2.6e-11 mbar) Faraday
5e-14 Torr (6.7e-14 mbar) Multiplier -
Mass Stability±0.1 amu over 8 hours at stable ambient
-
Bake Out Temperature250°C with electronics removed
-
Operating Temperature200°C Faraday only with electronics 10-40°C
150°C Multiplier with electronics 10-40°C and pressure <1e-8 mbar
90°C Multiplier with electronics 10-40°C and pressure <1e-5 mbar -
Data Acquisition MethodDedicated realtime acquisition processor
-
Data Acquisition Speed<3ms per point for analog scans
-
Data Collection MethodsAnalog scanning, full mass range 8, 16 or 32 points/amu
Barchart scanning
Peak-jump collection of up to 15 peaks per scan -
Settling Time<20ms
-
Control MethodCE operating system processor with web-server interface
-
Command StructureDocumented ASCII command protocols
-
Electron Energy & Emission Current40 or 70eV fixed (set in web configuration)
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Filament ProtectionOpto-isolated input for filament protect or control with auto detection of presence of the jack plug as failsafe
-
Communication10/100 Base-T Ethernet, static or automatically assigned IP addresses
-
ComplianceCE (control unit)
Features
Resources
Literature
- e-Vision 2 General Purpose Residual Gas Analyzer (RGA) (409.8 kB, PDF)
Drawings & CADs
- e-Vision 2 Dimmensional Drawing (476.4 kB, PDF)
Ultra-High Velocity