Residual Gas Analyzers
Residual Gas Analyzers are an effective tool to analyze system gas loads resulting from real leaks, virtual leaks or chamber wall outgassing. RGAs have a number of advantages over traditional, dedicated gas leak detectors including the ability to differentiate between different gas species, comparable sensitivity levels, the ability to detect internal or "virtual" leaks and to detect and analyze outgassing problems.
Microvision 2 Flexible, Integration-ready Residual Gas Analyzer
- Field proven quadrupole mass analyzer design
- Faster and more accurate responses in closed-loop control applications
- Acquire the highest quality of data at the fastest possible speeds
e-Vision 2 General Purpose Residual Gas Analyzer
- Leak detection of vacuum lines, welds and seals
- Vacuum diagnostics
- Pump down monitoring
HPQ3 High Pressure 0.001 Torr Residual Gas Analyzers
- Upper working limit of 0.001 Torr total pressure
- Leak detection of vacuum lines, coolant lines, welds, and seals
- Chamber contaminant monitoring, including hydrocarbons
HPQ3S High Pressure 0.008 Torr Residual Gas Analyzer
- Upper working limit of 0.008 Torr total pressure
- Leak detection of vacuum lines, coolant lines, welds, and seals
- Application validated correction algorithms to compensate for sensitivity variation
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