317 Convection-Enhanced Pirani Vacuum Sensors are general purpose vacuum gauges for foreline pressure measurement up to 1000 Torr. They can be used in many industrial applications such as semiconductor manufacturing, load locks, leak detection, vacuum coating, and freeze dryers. Bakable and radiation-resistant versions of the 317 Convection-Enhanced Pirani Vacuum Sensor are suitable for high-energy physics applications.
Accessories
Compatible Cables
Resources
Drawings & CADs
Literature
937B UHV (Ultra High Vacuum) Gauging for High Energy Physics(300.7 kB, PDF)




