MKS Mass Flow Controller Modules are a compact and high density solution for integrating MKS MFCs with the MKS Automation Platform PAC or CM modules. MFC modules support either 15 or 9 pin analog mass flow controllers. The MFC Module has a direct 1:1 pin mapping of the MFC's, so connected mass flow controllers are fully powered and controlled through the MFC slice. Each MFC Module supports integrating 4 MKS mass flow controllers.
Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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AS11890G-02 Mass Flow Controller Module, DB15, 4 Channel | $916.00 |
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AS11890G-11 Mass Flow Controller Module, DB9, 4 Channel | $833.70 |
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