Mass Flow Controller Modules
Mass Flow Controller Modules
MKS Mass Flow Controller Modules are a compact and high density solution for integrating MKS MFCs with the MKS Automation Platform PAC or CM modules. MFC modules support either 15 or 9 pin analog mass flow controllers. The MFC Module has a direct 1:1 pin mapping of the MFC's, so connected mass flow controllers are fully powered and controlled through the MFC slice. Each MFC Module supports integrating 4 MKS mass flow controllers.
- Supports 15 or 9 pin analog mass flow controllers
- Direct 1:1 pin mapping of mass flow controllers
- Supports integration of 4 MKS mass flow controllers See All Features
| Compare | Description | Drawings, CAD & Specs | Avail. | Price | ||
|---|---|---|---|---|---|---|
 | AS11890G-02Mass Flow Controller Module, DB15, 4 Channel | |||||
| AS11890G-11Mass Flow Controller Module, DB9, 4 Channel |
Specifications
- TypeMass Flow Controller Module
- ADC Native Resolution14-bits
- Auxiliary Power Supply24 V ±5%
This input will be used to power MFCs connected through IO connector.
Each power output to MFC should be protected separately. - Power Consumption24 V ±5%
- Anti-alias HW Filtering200Hz ±20%, 6dB/octave minimum
- Analog Input Minimum Input CMRR50dB, 0-1kHz
- Analog Input Maximum Integral Non-linearity±2LSB (14bit @ 14v)
- Analog Input Number of AO Channels16 , Single Ended (4 for each MFC: Valve test point, Flow signal output, Optional input, Pressure output)
- Analog Input Voltage Range-2V to 14V
- Analog Input Maximum Error Over Full Range±0.05% of FS (over 20 - 30°C)
- Analog Input Sampling Rate6.25 kHz (160µSec , for all 16 channels)
(ADC oversampling is set to x32) - Analog Input ProtectionESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
- Analog Output Number of AO Channels4 Single Ended (1 for each MFC: Set Point Input)
- Analog Output DAC Native Resolution14-bits
- Analog Output Maximum Output Current5mA, into a 2kOhm, 10nF load
- Analog Output Output Accuracy at 25°C Ambient±0.1% of FS @5v, ±0.05% of Full Scale @10v
- Analog Output Settling Time±2.5mV in 1msec into 2kOhm, 10nF load
- Analog Output ProtectionESD to IEC 61000-4-2 ±4kV contact, short to 24V, +15V, or -15V
- Digital Output Maximum Voltage Drop when ON0.2V into 30kOhm Impedance
- Digital Output Number of DO Channels12 (3 for each MFC: valve open, valve close, flow zero)
- Digital Output Maximum Leakage Current OFF30µA
- Digital Output Minimum available current ON6mA
- Digital Output Protection5V TVS, resettable Fuse (25mA PTC)
- Logic Level5V TTL tri state DO for valve override function
Active HIGH and LOW.
HIGH opens MFC control valve
Low closes the valve and floating allows for set point to control
5V TTL Active Low for valve close
Valve open or Flow zero functions referenced to signal ground - Minimum Input Impedance150 kOhm
- Maximum Power Consumption per ModuleAssuming each MFC consumes 250mA and all AOs are fully loaded ≥24V_IO@1.5Amp, 24V_CORE@ 0.15Amp
- TimingValve override 100msec + response time (Digital Output)
- Operational Environment Temperature0 to +55°C
- Storage Temperature-40 to 85°C
- AltitudeUp to 2000 meters
- Humidity5 to 85% non-condensing
- Dimensions52.5 x 125 x 92.3 mm (W x H x D)
- MountingDIN rail
- ComplianceUL, CE, RoHS
Features
MKS Automation Platform
These modules are part of the MKS Automation Platform that provides a modular, scalable and configurable solution to meet your automation and control requirements. Designed to provide a complete automation solution to improve operational and productivity efficiencies, the Automation Platform enables faster implementations, provides lowest total cost of ownership, and improves utilization of existing tools and assets.
Accessories
Resources
Application Notes
Plug-and-Play Solution for Automation Control - Using the MKS Automation Platform with LabVIEW™(494.8 kB, PDF)
Literature
MKS Automation Platform(474.7 kB, PDF)
Manuals
MFC Mass Flow Controller Module Pin-outs(50.3 kB, PDF)
Drawings & CADs
MKS MFC Mass Flow Controller Module Model File(39.6 MB, STEP)
