Mass Flow Controller Modules
Mass Flow Controller Modules
MKS Mass Flow Controller Modules are a compact and high density solution for integrating MKS MFCs with the MKS Automation Platform PAC or CM modules. MFC modules support either 15 or 9 pin analog mass flow controllers. The MFC Module has a direct 1:1 pin mapping of the MFC's, so connected mass flow controllers are fully powered and controlled through the MFC slice. Each MFC Module supports integrating 4 MKS mass flow controllers.
Features
MKS Automation Platform
These modules are part of the MKS Automation Platform that provides a modular, scalable and configurable solution to meet your automation and control requirements. Designed to provide a complete automation solution to improve operational and productivity efficiencies, the Automation Platform enables faster implementations, provides lowest total cost of ownership, and improves utilization of existing tools and assets.
Resources
Application Notes
Plug-and-Play Solution for Automation Control - Using the MKS Automation Platform with LabVIEW™(494.8 kB, PDF)
Literature
MKS Automation Platform(474.7 kB, PDF)
Manuals
MFC Mass Flow Controller Module Pin-outs(50.3 kB, PDF)
Drawings & CADs
MKS MFC Mass Flow Controller Module Model File(39.6 MB, STEP)
