Automation Platform Interface Modules
The MKS Automation Platform can be configured with a variety of I/O Modules, depending on the type sensors, actuators, valves, and other devices that are being integrated with the MKS Programmable Automation Controller (PAC) or the MKS CM. MKS I/O slices communicate to the MKS PAC or CM via the L-BUS or EtherCAT, creating a scalable distributed I/O system.
Analog Input/Output Modules
- 8 analog inputs and 4 analog outputs
- Current or voltage inputs
- EtherCAT or MKS system bus
Digital Input/Output Modules
- 12 digital inputs and 12 digital outputs
- compact and high density solution
- 0-24V source or sink
Mass Flow Controller Modules
- Supports 15 or 9 pin analog mass flow controllers
- Direct 1:1 pin mapping of mass flow controllers
- Supports integration of 4 MKS mass flow controllers
Pulse Width Modulating Slice Modules
- Interface with solid state relays for temperature control
- 12 digital inputs and 12 PWM outputs
- Fixed input terminal
PAC Power Supply Modules
- Supplies additional power to the MKS Automation Platform
- Requires 24 VDC power
- Compact solution
Temperature Input Modules
- Supports interfacing all thermocouple types or RTD inputs
- 8 temperature inputs
- Fixed or removable input terminal
Pressure Input Modules
- Supports 15-pin analog Baratron, Convectron, Pirani & Piezo transducers
- Direct 1:1 pin mapping of pressure devices
- Supports integration of 4 MKS pressure measurement devices
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