Metal Etch Process Traps

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Overview

Our metal etch traps, when installed as a component in an Effluent Management Subsystem™, efficiently trap condensable effluents that are generated by aluminum etch processes without reducing pumping speed. High trapping capacity means a longer time between maintenance. Maintenance is simplified: you replace a single disposable trapping element rather than having to clean up many feet of vacuum line. Low cost of ownership is created by not having to run heated lines all the way to the scrubber.

Increases throughput and uptime in metal etch processes
Decreases maintenance frequency and reduces maintenance time
Eliminates the use of heaters after the trap
Protects vacuum pump and valves
High flow conductance

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Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Type	Availability	Featured Item	Price		Brand
		MetalEtchTrap Metal Etch Process Trap, Disposable Trapping Element, Effluent Management Show	MetalEtchTrap Metal Etch Process Trap, Disposable Trapping Element, Effluent Management	UNIVERSAL	0.0	1.0	0.0		0.0	Metal Etch Process Trap	Show

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Specifications

Capacity

3 lbs. AICl₃
Exposed Materials

Stainless Steel, Viton®
Flow Conductance

p = pressure in mTorr
c = 1355 + 5.73p

Pressure Drop

Q = gas flow rate in sccm
= pressure in mTorr
Dp = Q/c
Dry Weight

13 lbs (5.9 kg)

Features

Accessories

Description	Compatibility	Avail.	Price
4620-1103 Entry Port Heater, Metal Etch Trap, Low Temp Alert, NW 50, 3 in., 120 VAC	UNIVERSAL	Show	$794.00
4615-0103 Entry Port Heater, Metal Etch Trap, NW 40, 3 inch length, 120 VAC	UNIVERSAL	Show	$696.00
4615-1103 Entry Port Heater, Metal Etch Trap, Low Temp Alert, NW 40, 3 in., 120 VAC	UNIVERSAL	Show	$765.00
43PWRCORD04 Power Cord, 6 ft., Ground Fault Circuit, Vapor Sublimation Trap Heaters	UNIVERSAL	Show	$179.00
4620-0103 Entry Port Heater, Metal Etch Trap, NW 50, 3 inch length, 120 VAC	UNIVERSAL	Show	$713.00
100760516 Centering Ring Seal Assembly, ISO-MF, NW160, Viton O-ring, 304 S.S.	UNIVERSAL	Show	$101.00