Virtual Wall™ Nitrogen Process Barriers
Overview
The unique Virtual Wall™ is a patented device that provides a nitrogen boundary layer inside vacuum lines. When used as part of an Effluent Management Subsystem in the vacuum foreline, the results can include increased uptime, reduced particles, increased throughput and higher yields. When used as part of a Scrubber Inlet Transition Kit in the exhaust line, the results can include increased uptime, reduced maintenance, safer cleaning and byproduct disposal, and improved throughput.
- Reduces surface chemical reaction, lowering the solid deposition at the scrubber inlet
- Prevents exposure to potentially hazardous chemicals
- Moves solid byproducts downstream into the scrubber
- Available in several sizes for use with the most common scrubber
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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VirtualWall Virtual Wall, Nitrogen Barrier Device, Effluent Management |
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Features
Resources
Literature
- Virtual Wall nitrogen barrier device for LPCVD TEOS Datasheet (278.9 kB, PDF)
- Virtual Wall Nitrogen Barrier for Scrubber Inlets Datasheet (336.9 kB, PDF)
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