P4B High Performance Mass Flow Meter, 5-50000 sccm
Overview
The P4B is a 1.125 inch body, multi-gas/multi-range, metal sealed, Mass Flow Meter (MFM). The P4B meter incorporates the latest in digital flow meter electronics along with a well proven, patented thermal sensor and mechanical design. The digital electronics utilize the latest MKS algorithms providing multi-gas/multi-range measurement capability. Included is a digital calibration that yields 1% of Reading accuracy on the calibration gas.
- Tightly controlled flow accuracy of process gas for improved chamber process matching
- Embedded configuration and diagnostics software that allows the user to check MFM functionality without device removal from the tool
Products
Configuration Options
The following options are available for P4B High Performance Mass Flow Meters
Ordering Code Example: P4B013502C60030
|
Configuration Option |
Option Code |
|---|---|
| P4B Mass Flow Meter | P4B |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
Flow Range Full Scale |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| Swagelok 4 VCR | R |
| C-seal (1.125 in.) | C |
| W-seal (1.125 in.) | H |
Connector |
|
| DeviceNet | 6 |
| 15 pin D (Analog I/O) | B |
| 9 pin D (Analog I/O) | A |
Valve/Device Type |
|
| No Valve (MFM) | 0 |
Reserved |
|
| Reserved | 0 |
Firmware |
|
| MKS will ship firmware revision current to date | 30 |
Specifications
-
TypeMass Flow Meter
-
Full Scale Flow Range5-50000 sccm
-
Measurement Range0.1-100% of Full Scale (range on mech.)
-
Maximum Inlet Pressure500 psig
-
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale -
Repeatability±0.3% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale./°C
-
Span Temperature Coefficient<0.08% of Reading./°C
-
Inlet Pressure Coefficient<0.02% of Reading/psi
-
Warm-up Time<30 min (to within 0.2% of Full Scale of steady state performance)
-
Operating Temperature10-50°C
-
Storage Humidity0-95% relative humidity, non-condensing
-
Storage Temperature-20° to 80°C (-4° to 149° F)
-
Temperature Display0-100°C
-
Temperature Accuracy±2°C
-
Temperature Resolution0.1°C
-
Display4 digits for value, 4 characters for unit
-
Fitting TypeCompatible with: Swagelok® 4 VCR®, 1.125 in. surface mount (C-seal, W-seal), 1.5 in. W-seal
-
External Leak Integrity<1 x 10-10
-
Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.
-
Surface Finish10μ inch average Ra
-
Weight<2.5 lbs (1.1kg)
-
ComplianceCE
-
Power Requirements+15 to +24 VDC @ 200mA max
-
Analog I/O Connector15-pin Type “D” Male, 9 pin Type “D” Male
-
Flow Input Output Signal0 to 5 VDC
-
DeviceNet Connector5 pin microconnnector (DeviceNet)
-
RS485 Connector9 pin Type “D” Male
Ultra-High Velocity