The following options are available for P4B Metal-sealed, Digital Mass Flow Controllers
Ordering Code Example: P4B013502C6T030
Configuration Option |
Option Code |
---|---|
P4B Mass Flow Controller | P4B |
Gas (Per Semi Standard E52-0703) |
|
Nitrogen (N2) | 013 |
Ammonia (NH3) | 029 |
Sulfur Hexafluoride (SF6) | 110 |
Other Gas Options | See Here |
Flow Range Full Scale |
|
5 sccm | 500 |
10 sccm | 101 |
20 sccm | 201 |
50 sccm | 501 |
100 sccm | 102 |
200 sccm | 202 |
500 sccm | 502 |
1000 sccm | 103 |
2000 sccm | 203 |
5000 sccm | 503 |
10000 sccm | 104 |
20000 sccm | 204 |
30000 sccm | 304 |
50000 sccm | 504 |
Fittings (compatible with) |
|
4 VCR Male | R |
C-seal (1.125 in.) | C |
W-seal (1.125 in.) | H |
Connector |
|
DeviceNet | 6 |
9 pin D connector | A |
15 pin D connector | B |
Valve Type |
|
Normally Closed, Teflon® (10 sccm - 50 slm) | T |
Normally Open, Teflon® (10 sccm - 50 slm) | P |
Mass Flow Meter | 0 |
Reserved |
|
Standard | 0 |
Firmware |
|
Shipped with up to date firmware revision | 30 |