P9B Mass Flow Meter with Integrated Pressure Transducer, 5-50000 sccm
Overview
The P9B multi-gas/multi-range, metal sealed, Mass Flow Meter (MFM) uses the latest in electronics enabling it to meet the most critical of process gas flow measurement requirements. The P9B Mass Flow Meter has an integrated Baratron® Capacitance Manometer, 0-100 psia Full Scale, pressure transducer that allows the user to measure and monitor line pressure. The pressure can be observed via the multi-directional LED display located on the top of the MFM.
- Embedded 100 psia pressure transducer allows the user to monitor MFM line pressure
- Accurate flow measurement over a wide dynamic range, even when down ranged, reduces need for an additional low range MFM
- Embedded configuration and diagnostics software that allows the user to check MFM functionality
Products
Configuration Options
The following options are available for P9B High Performance Mass Flow Meters
Ordering Code Example: P9B013502C60030
|
Configuration Option |
Option Code |
|---|---|
| P9B Mass Flow Meter | P9B |
Gas (Per Semi Standard E52-0703) |
|
| Nitrogen (N2) | 013 |
| Ammonia (NH3) | 029 |
| Sulfur Hexafluoride (SF6) | 110 |
Flow Range Full Scale |
|
| 5 sccm | 500 |
| 10 sccm | 101 |
| 20 sccm | 201 |
| 50 sccm | 501 |
| 100 sccm | 102 |
| 200 sccm | 202 |
| 500 sccm | 502 |
| 1000 sccm | 103 |
| 2000 sccm | 203 |
| 5000 sccm | 503 |
| 10000 sccm | 104 |
| 20000 sccm | 204 |
| 30000 sccm | 304 |
| 50000 sccm | 504 |
Fittings (compatible with) |
|
| Swagelok 4 VCR | R |
| C-seal (1.125 in.) | C |
| W-seal (1.125 in.) | H |
| W-seal (1.15 in.) | F |
Connector |
|
| DeviceNet | 6 |
| RS485 (uses 9 pin connector) | 5 |
| 15 pin D (Analog I/O) | B |
| 9 pin D (Analog I/O) | A |
Valve/Device Type |
|
| No Valve (MFM) | 0 |
Reserved |
|
| Reserved | 0 |
Firmware |
|
| EtherCAT | 10 |
| All Other I/O MKS will ship firmware revision current to date |
30 |
Specifications
-
TypeMass Flow Meter
-
Full Scale Flow Range5-50000 sccm
-
Measurement Range0.1-100% of Full Scale (range on mech.)
-
Maximum Inlet Pressure500 psig
-
Proof Pressure1000 psig
-
Burst Pressure1500 psig
-
Typical Accuracy±1% of set point for 20-100% Full Scale
±0.2% of Full Scale for 2-20% Full Scale -
Repeatability±0.3% of Reading
-
Resolution0.1% of Full Scale
-
Zero Temperature Coefficient<0.05% of Full Scale./°C
-
Span Temperature Coefficient<0.08% of Reading./°C
-
Inlet Pressure Coefficient<0.02% of Reading/psi
-
Warm-up Time<30 min (to within 0.2% of Full Scale of steady state performance)
-
Operating Temperature10-50°C
-
Storage Humidity0 to 95% relative humidity, non-condensing
-
Storage Temperature-20° to 80°C (-4° to 149° F)
-
Temperature Display0-100°C
-
Temperature Accuracy±2°C
-
Temperature Resolution0.1°C
-
Display4 digits for value, 4 characters for unit
-
Pressure Display0-100 psia
-
Pressure Readout Unitspsia, kPA
-
Pressure Accuracy1% Full Scale
-
Pressure Resolution0.1 psia
-
Fitting TypeCompatible with: Swagelok® 4 VCR®, 1.125 in. surface mount (C-seal, W-seal), 1.5 in. W-seal
-
External Leak Integrity<1 x 10-10
-
Wetted Materials316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S.
-
Surface Finish10μ inch average Ra
-
Weight<2.5 lbs (1.1kg)
-
ComplianceCE
-
Power Requirements+15 to +24 VDC @ 200mA max
-
Analog I/O Connector15-pin Type “D” Male, 9 pin Type “D” Male
-
Flow Input Output Signal0-5 VDC
-
DeviceNet Connector5 pin microconnnector (DeviceNet)
-
RS485 Connector9 pin Type D male
-
Attitude Insensitivity0.25% of Full Scale for indicated zero, span and actual span
Features
Resources
Literature
- P9B Mass Flow Meter with Integrated Transducer (2.1 MB, PDF)
Manuals
- P9B Mass Flow Controller/Meter Manual (1.7 MB, PDF)
Application Notes
- Sample Gas Codes for Mass Flow Controllers/Meters
- Gas Correction Factors for Thermal-based Mass Flow
Ultra-High Velocity