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VISION-2000-A-XD
ALD, CVD Process High Sensitivity RGA
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 VISION-2000-A-XD ALD, CVD Process High Sensitivity RGA
Contact Us

Specifications

  • Mass Range
    1-100, 1-200, or 1-300 amu
  • Ion Source
    High conductance closed ion source
  • Filaments
    Independently replaceable twin Tungsten or Thoria filaments
  • Mass Filter
    Double filter (1 inch "RF only" pre-filter with 4 inch main filter)
  • Detector
    Dual (Faraday and secondary electron multiplier)
  • Maximum Analyzer Operating Pressure
    1e-3 Torr at the ion source inlet (standard), higher pressure optional
  • Minimum Detectable Partial Pressure
    <1e-12 Torr (for total pressures <1e-4 Torr on baseline inlet
  • Minimum Detectable Concentration
    <15 ppb (specified with Argon or Nitrogen for non-interfering peaks)
  • Mass Stability
    Better than ±0.1 amu over 8 hours
  • Resolution
    Better than 10% valley between peaks of equal height throughout the mass range
  • Base Pressure Range
    Maximum inlet pressure can be chosen in the range of 10 mTorr to 10 torr
  • Process Pressure Range
    Maximum inlet pressure can be chosen in the range of 100 mTorr to 760 torr. Please consult the factory for the exact range value closest to your desired pressure. *Inlets for <10 Torr can have optional gas flow acceleration.
  • Mounting Flange
    DN35CF (70mm/2.75'' OD) Conflat® flange. Custom adapters can be provided
  • Vacuum Hardware
    67 l/s turbomolecular pump with high conductance analyzer housing, inlet system, modular UniBloc inlet, automated vacuum control (RVC), completely interlocked and integrated
  • Backing Vacuum System
    Standard: Connected to the tool foreline pump via Surge Protect assembly with a KF16 fitting
    Optional: Independent chemically resistant, dry diaphragm pump with KF16 fitting for connecting the exhaust to a suitable scrubber system
  • Analyzer Housing Base Pressure
    Better than 5e-9 Torr after bakeout
  • UniBloc Maximum Temperature
    Up to 150°C or up to 200°C
  • Bakeout Temperature and Bakeout Jacket
    Included for 180°C bakeout of analyzer chamber
  • Operating Temperature
    70°C (controlled to ±1°C)
  • Weight
    33 lbs. (15 kg) to bolt on Process System
  • Mechanical Support
    Optional stands and brackets are available
  • Mobile RGA Platform
    Optional RGA trolley to improve versatility (footprint 18x24 in., 455x604 mm)
  • Pneumatics
    60-80 psig CDA
  • Electronics Weight on Flange
    1.7 kg
  • Power Requirements
    88-264 VAC, 47/63 Hz, 600 Watts
  • Maximum Operating Conditions
    Electronics: 10-40°C, 80% RH (non-condensing)
  • LED Status Indication
    Interlock status, filament emission, SEM, power and communications
  • I/O Capability
    4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
  • Other Facilities
    Leak check headset socket, external filament trip socket, instrument reset
  • Software
    Process Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® 7, Server 2016 or Windows 10 (recommended)
  • Communication
    Ethernet CAT-5e
  • PC Requirements
    Intel® i5 3.1Ghz or AMD Ryzen 5 4.4Ghz, 8GB RAM, 512 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
  • Simultaneous Multi-Sensor
    Process Eye Professional client/server configuration offers flexible multi-sensor operation.
  • RGA to Vacuum System Cable Length
    33 ft. (10 m) standard RGA and 10 ft. (3m) with mobile RGA platform. Other lengths available dependent upon process system and customer requirements
  • Shipping Weight
    132 lbs (60 Kg) may vary depending upon backing pump and instrument rack requirements
  • Compliance
    CE, UKCA

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