TOOLweb® RGA Process and Chamber Environment Software

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toolweb rga process and chamber environment monitor software

Overview

TOOLweb® RGA is an automated platform for the control and monitoring of process-specific RGA and other general sensors on various semiconductor tools. Comprising of sensor hardware, a tool connectivity module and software for real-time control and web-based data review, TOOLweb® RGA monitors the tool chamber environment both during and between periods of wafer processing and after a pump-down.

Detection of wafer borne contaminants
Monitoring of process gas composition and purity
Identification of chamber leaks
Monitoring of chamber pump performance
Highlighting of chamber issues to speed up PM recovery
Chamber-to-chamber comparisons

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Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Type	Availability	Featured Item	Price		Brand
		TOOLWEB-RGA Chamber Monitor Software, Residual Gas Analyzer, TOOLweb® Show	TOOLWEB-RGA Chamber Monitor Software, Residual Gas Analyzer, TOOLweb®	UNIVERSAL	0.0	1.0	0.0		0.0	RGA Process Monitor Software	Show