972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
Model: 972B-22030
972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
Model: 972B-22030

Overview
Overview
The 972B-22030 DualMag Cold Cathode Vacuum Transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and features a size NW25 ISO-KF flange fitting. It has an RS485 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. Three included mechanical relays can be used for process control like interlocking valves or pumps. DualMag transducers combine cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure. The MicroPirani offers 1-2 decades lower measuring range than a traditional pirani gauge, subsequently by lowering the cold cathode activation pressure gauge, reliability is improved and the service interval extended. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B have standard 15 pin HD Sub-D connector. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software.
Technical Specs
- Absolute Measurement Range1.0 x 10-8 to 760 Torr
- Digital CommunicationRS485
- TypeVacuum Transducer
- SensorCold Cathode and MicroPirani™ (MEMS Thermal Conductivity)
- DisplayNo
- Seal MaterialViton
- EnclosureStandard
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceRS485/analog
- Relays3
- Fitting TypeNW25 ISO-KF
- Installation OrientationAny
- Set Point Range1 x 10-8 Torr to Atmosphere Absolute
- Calibration GasNitrogen
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsPressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
- Digital StatusPressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
- Analog Output0.5 VDC per Decade
- Relay Contact Rating1 A @ 30VAC/DC, resistive
- Power Requirements9 - 30 VDC, 2 Watts
- Accuracy5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±5% of Reading (Typical)Combined Absolute
- Repeatability5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±2% of Reading (Typical) Combined Absolute
- Overpressure Limit1500 Torr
- Internal Volume21 cm3
- Exposed Materials304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton, epoxy resin, ceramic
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
Technical Specs
- Absolute Measurement Range1.0 x 10-8 to 760 Torr
- Digital CommunicationRS485
- TypeVacuum Transducer
- SensorCold Cathode and MicroPirani™ (MEMS Thermal Conductivity)
- DisplayNo
- Seal MaterialViton
- EnclosureStandard
- Electrical Connector15-pin, High Density, D-sub male
- InterfaceRS485/analog
- Relays3
- Fitting TypeNW25 ISO-KF
- Installation OrientationAny
- Set Point Range1 x 10-8 Torr to Atmosphere Absolute
- Calibration GasNitrogen
- Operating Temperature0 - 40°C (32 - 104°F)
- Maximum Bakeout Temperature85°C (185°F)
- Digital ControlsPressure units, baud rate, address, factory default, user tag, RS485 test, gas correction, set point functions: value, hysteresis, direction, HV enable, protect, control set point, gas type
- Digital StatusPressure reading and units, set point, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions
- Analog Output0.5 VDC per Decade
- Relay Contact Rating1 A @ 30VAC/DC, resistive
- Power Requirements9 - 30 VDC, 2 Watts
- Accuracy5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±5% of Reading (Typical)Combined Absolute
- Repeatability5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±2% of Reading (Typical) Combined Absolute
- Overpressure Limit1500 Torr
- Internal Volume21 cm3
- Exposed Materials304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton, epoxy resin, ceramic
- Electronic Casing and Flange304 stainless steel
- ComplianceCE
Resources & Downloads
Literature
970 Cold Cathode Transducers(250.9 kB, PDF)
