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Vacuum Pressure Transducers
MKS modular vacuum transducers feature compact size that dramatically reduces installation costs. These vacuum/pressure gauges are ideal for applications where controller size and local control are critically important. They are available as pressure transducers with an analog output, or as vacuum modules with digital communications used to transmit the pressure signal.
901P MicroPirani™ - Piezo Loadlock Vacuum Transducer
- Absolute pressure measurement from 1,000 to 10-5 Torr
- 3-sensor functionality in a single transducer for a wide measurement range
- Analog, RS232, RS485, & EtherCAT® versions
925 Micro Pirani™ Vacuum Transducers
- Absolute measurement range from 10-5 Torr to Atmosphere
- MicroPirani sensor is resistant to damage from air inrush or vibration
- Analog, RS232, RS485, & EtherCAT® versions
910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Transducers
- Absolute pressure measurement from 1500 to 10-5 Torr
- Two sensors in a single transducer for wide measurement range
- Gas independent absolute pressure measurement from 11 to 1500 Torr
275 Mini-Convectron® Vacuum Transducers
- Absolute pressure measurement from atmosphere to 10-4 Torr
- Compact and rugged all-metal package is virtually immune to RF interference
- All functions programmable through RS485 or DeviceNet interfaces
902B Absolute Piezo Vacuum Transducers
- Low cost transducer with 0.1 to 1000 Torr measurement range
- Solid state Piezo sensor resistant to damage from air inrush and vibrations
- robust design and stainless steel construction for harsh processes
971B UniMag™ Cold Cathode Vacuum Transducers
- Absolute measurement range from 1x10-8 to 0.005 Torr
- The cold cathode anode module design is user serviceable to decrease downtime
- Ease of operation via analog output, RS232, or RS485
972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
- Absolute measurement from 10-8 Torr to atmosphere
- Cold cathode anode module design is user serviceable to decrease downtime
- RS232, RS485 or EtherCAT®/Analog communications
974B QuadMag™ Cold Cathode - MicroPirani™ - Piezo Vacuum Transducers
- Absolute measurement from 10-8 Torr to atmosphere
- Cold cathode anode module is user serviceable to decrease downtime
- MEMS based MicroPirani sensor allows low auto cold cathode turn-on pressure
355 Micro-Ion® Hot Cathode Vacuum Transducers
- Vacuum pressure measurement to 10-9 Torr
- Dual filaments increase equipment uptime
- Optional local display aids in setup and diagnostics
390 Micro-Ion® ATM Vacuum Transducers
- Continuous pressure measurement from 10-9 Torr to atmosphere
- Precision differential pressure measurement at atmosphere
- Dual ionization gauge filaments increase equipment uptime
392 Micro-Ion® Plus Vacuum Transducers
- Continuous pressure measurement from 10-9 Torr to atmosphere
- Dual ionization gauge filaments that increase equipment uptime
- EtherCAT, RS-485 and DeviceNet have optional setpoint relays for process control
905 MicroPirani™ Vacuum Transducer Kit
- Wide measurement range from atmosphere to 10-5 Torr
- Three open collector set points for advanced process control
- User-friendly digital control via host processor or computer
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