E28H 0.05-100 Torr Heated (100°C) Baratron® Capacitance Manometers with Etch Sensor
Model: E28HU5TBF6B
E28H 0.05-100 Torr Heated (100°C) Baratron® Capacitance Manometers with Etch Sensor
Model: E28HU5TBF6B

Overview
Overview
The E28HU5TBF6B e-Baratron® Ethernet-Enabled, 100°C Heated Absolute Capacitance Manometer, with an Etch Sensor features 0.05 Torr full scale pressure measurement with 0.5% accuracy, horizontal calibration, and a Swagelok® 8 female VCR® fitting. It features structures in the sensor housing that eliminate process byproducts from depositing on the surface of the diaphragm, minimizing drift. Included heater and temperature status LED/switches indicate that the heater is at the 100°C set point. Updated temperature control electronics to provide superior long-term stability and repeatability. Based on established Baratron® capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 128, 628, E28 Baratron® capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices.
Technical Specs
- TypeVacuum/pressure Transducer
- Measurement TypeAbsolute
- Sensor Temperature100°C
- Full Scale Range0.05 Torr
- Accuracy0.50% of Reading
- Resolution0.002% of Full Scale
- Fitting Type8 VCR female
- Analog Output0-10 VDC
- Analog Connector15-pin D-sub with Thread Locks
- CalibrationHorizontal
- Zero Temperature Coefficient0.02% of Full Scale/°C
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15-40°C
- Volume6.3 cc
- Warm-up Time4 hours
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Exposed MaterialsInconel®
- Power Requirements±15 VDC ±5% @ 0.6 Amps (max.)
- IndicatorsHeater Status LED
- ComplianceCE
Technical Specs
- TypeVacuum/pressure Transducer
- Measurement TypeAbsolute
- Sensor Temperature100°C
- Full Scale Range0.05 Torr
- Accuracy0.50% of Reading
- Resolution0.002% of Full Scale
- Fitting Type8 VCR female
- Analog Output0-10 VDC
- Analog Connector15-pin D-sub with Thread Locks
- CalibrationHorizontal
- Zero Temperature Coefficient0.02% of Full Scale/°C
- Span Temperature Coefficient0.02% of Reading/°C
- Operating Temperature Range15-40°C
- Volume6.3 cc
- Warm-up Time4 hours
- Overpressure Limit45 psia (310 kPa) or 120% of Full Scale, whichever is greater
- Exposed MaterialsInconel®
- Power Requirements±15 VDC ±5% @ 0.6 Amps (max.)
- IndicatorsHeater Status LED
- ComplianceCE
Resources & Downloads
Drawings & CADs
E28 Dimensional Drawing(126.9 kB, PDF)
