GE50A Elastomer-sealed 5-50,000 sccm Mass Flow Controllers
Model: GE50A013101RMV020
GE50A Elastomer-sealed 5-50,000 sccm Mass Flow Controllers
Model: GE50A013101RMV020
Overview
Overview
The G-Series GE50A013101RMV020 Mass Flow Controller features a Full Scale flow range of 10 sccm and is calibrated for Nitrogen (or equivilant) gas. It has a 4 VCR type male fitting and 15-pin type D connector with tied grounds for 0 to 5 VDC mass flow control. A normally closed valve has Viton seals. G-Series mass flow controllers utilize the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range.
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range10 sccm
- Control Range0.2 - 10 sccm
- Calibration GasN2 (or equivalent)
- Fitting Type4 VCR male
- Seal MaterialViton
- Flow Input Output Signal0 - 5 VDC
- Analog Connector15-pin D-sub (tied grounds)
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 to 40 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10 - 50°C
- Storage Humidity0 to 95% Relative Humidity, non-condensing
- Storage Temperature-20 to 80°C
- External Leak Integrity<1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed ValveUp to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
- Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
- Surface Finish16µ inch average Ra
- Weight3 lbs (1.4 kg)
- ComplianceCE
Technical Specs
- TypeMass Flow Controller
- Full Scale Flow Range10 sccm
- Control Range0.2 - 10 sccm
- Calibration GasN2 (or equivalent)
- Fitting Type4 VCR male
- Seal MaterialViton
- Flow Input Output Signal0 - 5 VDC
- Analog Connector15-pin D-sub (tied grounds)
- Maximum Inlet Pressure150 psig
- Normal Operating Pressure Differential10 to 40 psid
- Proof Pressure1000 psig
- Burst Pressure1500 psig
- Typical Accuracy±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale
- Repeatability±0.3% of Reading
- Resolution0.1% of Full Scale
- Zero Temperature Coefficient<0.05% of Full Scale/°C
- Span Temperature Coefficient<0.08% of Reading/°C
- Inlet Pressure Coefficient<0.02% of Reading/psi
- Typical Settling Time<750 msec, typical above 5% Full Scale
- Warm-up Time30 minutes
- Operating Temperature10 - 50°C
- Storage Humidity0 to 95% Relative Humidity, non-condensing
- Storage Temperature-20 to 80°C
- External Leak Integrity<1 x 10-09 (scc/sec He)
- Leak Integrity Through Closed ValveUp to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere
- Wetted Materials316L S.S. VAR, 316 S.S., Elgiloy®, Nickel
- Surface Finish16µ inch average Ra
- Weight3 lbs (1.4 kg)
- ComplianceCE
Resources & Downloads
Drawings & CADs
Literature
GE50A Elastomer-sealed, Digital Mass Flow Controller(449.5 kB, PDF)