Better than 10% valley for peaks of equal height across mass range
Mounting Flange
DN35CF (70 mm/2.75 in. OD) Conflat
Vacuum Hardware
Analyzer housing plus pneumatic isolation valve. Optional independent total pressure gauge and/or valve and filament trip-box assemblies available for interlocked protection of the RGA.
Interlock status, emission OK, SEM, power and communications
I/O Capability
4 analog inputs (-11 to +11 v, 22 bit), 2 analog outputs (0-10 V, 12 bit), 16 digital TTL I/O, 1 opto-isolated filament control input, one dedicated gauge port, Optional PC-based Generic I/O support for PCI slots, USB and Ethernet I/O devices. Modbus/GEM SECS support for some product configurations.
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Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA