Vision 2000-B™ Vacuum Baseline Residual Gas Analyzers for Process Tools

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vision 2000-b vacuum baseline rga for process tools

Overview

The Vision 2000-B™ is designed to track levels of potentially damaging residual gases that can negatively impact the quality of product – for example, aluminum deposition can be negatively impacted by the presence of O2 and H2 O, which can lead to poor bulk film characteristics and surface roughness. The Vision 2000-B features the “smart head” technology from the Microvision 2. The electronics unit mounts directly onto the analyzer head, and connects to the system PC via an ethernet interface.

Monitor vacuum pumpdown, baseline, and leakback conditions
100 amu standard mass range with 200 amu or 300 amu options
Process Eye™ Professional or optional TOOLweb® RGA software
Simultaneous multiple-sensor operation capability
Integration with tools for interdiction and alarms
Alarm levels that dynamically change based on the slit valve positions

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Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Mass Range	Mass Stability	Type	Availability	Featured Item	Price		Brand
		VISION-2000-B Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA Show	VISION-2000-B Vacuum Baseline Monitor, Process Tools, Vision 2000-B™ RGA	UNIVERSAL	0.0	1.0	0.0		0.0	1-100, 1-200, or 1-300 amu	Better than ±0.1 amu over 8 hours	Residual Gas Analyzer	Show

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Specifications

Mass Range

1-100, 1-200, or 1-300 amu
Ion Source

Open ion source
Filaments

Replaceable twin Tungsten or Thoria filaments
Mass Filter

Double filter (1 inch RF only pre-filter with 4 inch main filter)
Detector

Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure

7.6e-5 Torr (1e-4 mbar)
Minimum Detectable Concentration

Faraday: 2e-11 Torr (2.7e-11 mbar)
Secondary electron multiplier: 5e-14 Torr (6.7e-14 mbar)
Mass Stability

Better than ±0.1 amu over 8 hours
Resolution

Better than 10% valley between peaks of equal height throughout the mass range
Mounting Flange

DN35CF (70mm/2.75inch OD) Conflat® flange
Vacuum Hardware

Analyzer housing plus pneumatic isolation valve. Optional independent total pressure gauge and/or valve and filament trip-box assemblies available for interlocked protection of the RGA.
Operating Temperature

Electronics: 10-40°C

Weight

Control Module: 1.7 kg
Pneumatics

60-80 psig CDA
Power Requirements

24 VDC, 3.4A, external supply (included), 100-120V/200-240V, 2.1 Amp, 47-63 Hz
LED Status Indication

Interlock status, emission OK, SEM, power and communications
I/O Capability

4 analog inputs (-11 to +11v, 22 bit)
2 analog outputs (0-10V, 12 bit)
16 digital TTL I/O
1 opto-isolated filament control input
1 dedicated gauge port
Other Facilities

Leak check headset socket, external filament trip and instrument reset
Software

Process Eye® Professional fully network compatible control platform generating under Microsoft® Windows® 2000, xP* or Vista* (*recommended)
Communication

Ethernet CAT-5e
PC Requirements

Intel® Pentium IV® or AMD Athlon xP 1.2GHz, 1024 MB RAM, 120 GB disk free space drive. Multi-sensor installation may require higher specifications.
Simultaneous Multi-Sensor

Multi-Sensor Process Eye Professional client/server configuration offers flexible multi-sensor operation
Shipping Weight

25 lbs (11.4 Kg)
Compliance

CE (control unit)

Features

Accessories

Compatible Software

Description	Compatibility	Avail.	Price
512-000/D Gas Analyzer Software, EasyView, Residual Gas	UNIVERSAL	Show	$721
TOOLWEB-RGA Chamber Monitor Software, Residual Gas Analyzer, TOOLweb®	UNIVERSAL	Show
PROCESS-EYE-PROFESSIONAL Process Monitoring Software, Residual Gas Analyzer, Process Eye™ Professional	UNIVERSAL	Show