R Series gate valves are optimized for the isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. The R Series is available with a range of options, including pneumatic and manual actuators, lock out tag out capability, and soft-pump bypass to eliminate turbulence and associated particle generation during pumpdown from atmosphere.
Gate Valves
R Series gate valves are optimized for the isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. The R Series is available with a range of options, including pneumatic and manual actuators, lock out tag out capability, and soft-pump bypass to eliminate turbulence and associated particle generation during pumpdown from atmosphere.
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Ultra-High Velocity