Process Sense™ endpoint sensors are a small, low-cost SiF4 sensor specifically designed for remote plasma chamber clean endpoint detection for silicon-based CVD deposition chambers. Process Sense™ is based on infrared absorption, the only technique applicable to all in-situ and remote plasma cleaning processes.
NDIR Gas Analyzers
Process Sense™ endpoint sensors are a small, low-cost SiF4 sensor specifically designed for remote plasma chamber clean endpoint detection for silicon-based CVD deposition chambers. Process Sense™ is based on infrared absorption, the only technique applicable to all in-situ and remote plasma cleaning processes.
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