The 148J All Metal Control Valve minimizes particle generation and reduce outgassing of residual contaminants which could lead to device failures and poor yields. Metal seals with a guaranteed external leak rate of less than 1 x 10-10 atm cc/sec (He) are used in order to avoid contamination and corrosion. The 148 high temperature valve can operate to process temperatures of 150°C.
Resources
Manuals
148J Pressure Control Valve User Manual(267 kB, PDF)
Drawings & CADs
148J Control Valve Model File(1.2 MB, STP)




