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  5. 148J All-metal Flow Control Valve

148J All-metal Flow Control Valve

Overview Features Resources Contact Us

148J All-metal Flow Control Valve

Overview Features Resources Contact Us

The 148J All Metal Control Valve minimizes particle generation and reduce outgassing of residual contaminants which could lead to device failures and poor yields. Metal seals with a guaranteed external leak rate of less than 1 x 10-10 atm cc/sec (He) are used in order to avoid contamination and corrosion. The 148 high temperature valve can operate to process temperatures of 150°C.

Resources

Manuals

  • 148J Pressure Control Valve User Manual(267 kB, PDF)

Drawings & CADs

  • 148J Control Valve Model File(1.2 MB, STP)

Technical Notes

  • Vacuum Pressure Control for Semiconductor Fabrication

Literature

  • 148JA Solenoid Control Valve(1.6 MB, PDF)

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