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  5. 248D General Purpose Solenoid Control Valve

248D General Purpose Flow Control Valve

Overview Features Resources Contact Us

248D General Purpose Flow Control Valve

Overview Features Resources Contact Us

The 248D control valve is a modified solenoid valve that when supplied with a controlling current will modulate the flow of gas. When used with an MKS controller and appropriate flow sensor, the 248D valve modulates gas flow while maintaining accurate and precise pressure or flow.

The valve seat connected to the armature is lifted away from the adjustable orifice as increasing current is applied to the solenoid. Two spiral springs center the armature within the valve body and oppose the magnetic lifting force. These springs minimize friction and hysteresis, Product Features major causes of poor control performance. With a 1249 control valve driver to provide the necessary drive signal to operate the solenoid valve, the 248D valve can be used for either pressure or flow control.

The orifice of the 248D valve is easily adjusted or replaced without special tools. Adjustment may be required to eliminate leakage across the valve resulting from normal operational wear. Replacement is required when wear is excessive or to change the flow range of the valve.

Resources

Manuals

  • 248A/B/C Flow Control Valve Manual(106.7 kB, PDF)

Drawings & CADs

  • 248D Flow Control Valve 3D Model Files

Technical Notes

  • Vacuum Pressure Control for Semiconductor Fabrication

Literature

  • 248D Solenoid Control Valve(1.7 MB, PDF)

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