300 mm Resist-Torr Photoresist Detection Monitor for High Pressure Degas
Overview
The 300 mm Resist-Torr consists of an optimum combination of a closed ion source quadrupole mass analyzer with fast response capillary inlet, together with advanced proprietary algorithms developed exclusively for the degas chambers on industry leading 300 mm PVD cluster tools. When utilized with the powerful features of Process Eye™ and TOOLweb RGA sensor control software package, the result is completely automated operation and highly reliable photoresist detection. Unscheduled downtimes are reduced and device yields are improved.
- Detection of photoresist contamination during high pressure (~8 Torr) degas
- Fully automated process monitoring means no operator necessary
- Calculation of PR Index - a measure of photoresist contamination level
- Built in calibration standard with automatic calibration routine enables long-term data comparison and proper system operation
- Variable alarm sensitivity to match the conditions of your product in your fab or process tool
- Powerful optional data review feature to maximize ROI
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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300MM-RESIST-TORR Photoresist Detection Monitor, 300 mm Resist-Torr® |
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Specifications
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Mass Range1-200 amu
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Ion SourceHigh sensitivity, closed ion source
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FilamentsReplaceable twin Thoria filaments
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Mass FilterDouble filter (1 inch "RF only" pre-filter with 4 inch main filter)
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DetectorDual (Faraday and Secondary Electron Multiplier)
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Minimum Detectable Concentration<100ppb for all common gases except <10ppm for H2
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Mass StabilityBetter than ±0.1 amu over 8 hours
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ResolutionBetter than 10% valley between peaks of equal height throughout the mass range
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Mounting Flange2.75 inch Conflat® flange, SS capillary
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Vacuum Hardware60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
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Analyzer Housing Base PressureBetter than 5x10-9 Torr after bakeout
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Bakeout Temperature and Bakeout JacketIncluded for 200°C bakeout
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Operating TemperatureElectronics: 10-40°C
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Pneumatics60-80 psig CDA
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Power Requirements88-264 VAC, 47/63 Hz, 600 Watts
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Maximum Operating Conditions80% RH (non condensing)
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LED Status IndicationInterlock status, filament emission, SEM, power and communications
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I/O Capability4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
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Other FacilitiesLeak check headset socket, external filament trip socket, instrument reset
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SoftwareProcess Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® xP, Vista, Server 2008 or Windows 7 (recommended)
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CommunicationEthernet CAT-5e
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PC RequirementsIntel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use.
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Simultaneous Multi-SensorProcess Eye Professional client/server configuration offers flexible multi-sensor operation
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RGA to Vacuum System Cable Length33 feet (10 m)
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Shipping Weight85 pounds (38.5 Kg)
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Foreline PumpDry diaphragm standard
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InletDual path with fast-response capillary for degas monitoring and high conductance for base vacuum. Includes heater jacket.
Features
Resources
Drawings & CADs
- 300mm Resist-Torr® Dimensional Drawing (176.6 kB, PDF)
Literature
- 300mm Resist-Torr for High Pressure Degas (335.5 kB, PDF)
Ultra-High Velocity