300 mm Resist-Torr XD High Sensitivity Photoresist Detection Monitor
Overview
The 300mm Resist-Torr® XD incorporates V-lens™ technology advancing the proven performance of the 300mm Resist-Torr® system to a new level of sensitivity, selectivity, and confidence in degas applications, compared with conventional quadrupole mass spectrometry-based residual gas analyzers. The 300mm Resist-Torr XD overcomes issues presented by challenging gases such as Argon that the limited detection power of conventional systems cannot address. In combination with the unique PR index from MKS, this powerful platform delivers a clear advantage for the monitoring and detection of trace gases.
- Detection of photoresist contamination during high pressure (~8 Torr) degas
- Up to 10 times increased sensitivity at lower masses (<15ppb)
- Reliable distinction between gases and background
- 2x improvement in absolute sensitivity - from improved focusing
- Fully automated process monitoring means no operator necessary
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
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300MM-RESIST-TORR-XD Photoresist Detection Monitor, High Sensitivity, 300 mm Resist-Torr® |
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Specifications
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Mass Range1-200 amu
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Ion SourceHigh sensitivity, closed ion source
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FilamentsReplaceable twin Thoria filaments
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Mass FilterDouble filter (1 inch "RF only" pre-filter with 4 inch main filter)
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DetectorDual (Faraday and Secondary Electron Multiplier)
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Minimum Detectable Concentration<15ppb specified with Argon or Nitrogen
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Mass StabilityBetter than ±0.1 amu over 8 hours
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ResolutionBetter than 10% valley between peaks of equal height throughout the mass range
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Mounting Flange2.75 inch Conflat® flange, SS capillary
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Vacuum Hardware60 l/s turbomolecular pump with high conductance analyzer housing, fast response capillary inlet system, automated vacuum controller (RVC) completely interlocked and integrated
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Analyzer Housing Base PressureBetter than 5x10-9 Torr after bakeout
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Bakeout Temperature and Bakeout JacketIncluded for 200°C bakeout
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Operating TemperatureElectronics: 10-40°C
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Pneumatics60-80 psig CDA
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Power Requirements88-264 VAC, 47/63 Hz, 600 Watts
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Maximum Operating Conditions80% RH (non condensing)
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LED Status IndicationInterlock status, filament emission, SEM, power and communications
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I/O Capability4 analog inputs and 2 outputs (plus 1 dedicated gauge input). Optional support for a large number of both analog and digital inputs and outputs, including relay control
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Other FacilitiesLeak check headset socket, external filament trip socket, instrument reset
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SoftwareProcess Eye Professional fully network compatible control platform generating under 32bit or 64bit Microsoft® Windows® xP, Vista, Server 2008 or Windows 7 (recommended)
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CommunicationEthernet CAT-5e
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PC RequirementsIntel® Pentium IV® or AMD Athlon xP 1.2GHz, 1GB RAM, 120 GB hard drive, dependent upon total number of sensors on the computer and the operating system in use. Multi-sensor installation may require higher specifications.
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Simultaneous Multi-SensorProcess Eye Professional client/server configuration offers flexible multi-sensor operation.
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RGA to Vacuum System Cable Length33 feet (10 m)
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Shipping Weight85 pounds (38.5 kg)
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Foreline PumpDry diaphragm standard
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InletDual path with fast-response capillary for degas monitoring and high conductance for base vacuum. Includes heater jacket.
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ComplianceCompliant to RoHS Directive 2002/95/EC (control unit)
Features
Resources
Drawings & CADs
- 300mm Resist-Torr® XD Dimensional Drawing (2.9 MB, PDF)
Literature
- 300mm Resist-Torr® XD High Sensitivity Photoresist Detection RGA (451.8 kB, PDF)
Ultra-High Velocity