The Micro-Ion Gauge is the world’s smallest ionization gauge where pressure measurement is based on the amount of ion current that is generated when energized electrons collide with gas molecules in the gauge. High performance in a small volume is achieved through a number of enhancements including its patented dual ion collector design that optimizes electron motion and ion collection. Dual filaments provide extended lifetime by running both filaments simultaneously at a lower current, and avoid unscheduled downtime by using the second filament as a backup. Ultra-clean construction, including vacuum firing of all components and assembly in a Class 100 cleanroom environment ensures rapid, repeatable response during vacuum chamber pumpdown.

• World’s Smallest Ionization Gauge: Micro-Ion Gauges occupy less than 10% of the volume of conventional glass gauge or nude gauges, allowing easy installation in complex, tightly packed vacuum systems.
• High Performance: Patented dual ion collector design increases electron path length and ion collection efficiency providing high performance in a small volume.
• Long-Term Stability: The grid windings are attached to the grid posts every 180° for greater sensitivity and stability.
• Dual Filaments: Dual, burn-out resistant yttria-coated iridium filaments provide long gauge life. Unscheduled downtime is avoided by using the second filament as a back-up until the gauge can be replaced during regular maintenance procedures.
• Cooler Operation: At only 8% of the power consumption of a traditional glass or nude gauge, the Micro-Ion Gauge generates significantly less heat related process or experiment disturbances.
• Port Shield: Protects the electrode assembly from damage during assembly or vacuum chamber maintenance, and provides a stable electrical environment for improved measurement performance.
• All-Metal Enclosure: Prevents grid and filament damage during mounting and eliminates the risk of glass breakage.
• Wide Selection of Vacuum Fittings: Simplifies installation on your vacuum system.