The Series 392 Micro-Ion Plus combines Granville-Phillips® industry-standard and application-tested Micro-Ion ionization sensor with an innovative miniature Pirani Conductron sensor in a single gauge assembly envelope that is attached to a compact electronics control module. This compact modular design reduces the number of separate gauges, vacuum interfaces, cabling and control electronics that are typically required for full range pressure measurement. The full range pressure measurement is output as a single analog signal or is available through optional RS-485, DeviceNet or EtherCAT digital interfaces.

This second generation Micro-Ion Plus has integrated gauge assembly electronic memory that contains factory-calibration information. The electric memory is used by the control module to provide factory-level calibration accuracy for new and replacement gauges, and track gauge-tube usage information so the MKS service team can quickly understand your application environment. The miniature Pirani Conductron delivers improved accuracy through better thermal management within the gauge envelope. Finally, the Series 392 and Series 390 Micro-Ion ATM now share a common platform for improved product quality through high-volume manufacturing.

The vacuum gauge assembly can quickly and easily be replaced in the field using only a screwdriver after removal from the vacuum system. Integrated electronic gauge assembly calibration information ensures replacement gauge accuracy and repeatability.