The 649B upstream absolute pressure controller contains a Baratron® capacitance manometer, mass flow meter, normally-closed proportioning control valve, and closed-loop control electronics. The 649 controls absolute pressure. The patented mass flow sensor provides exceptional zero stability and accuracy of flow measurement. Full Scale ranges from 10 sccm to 5000 sccm nitrogen equivalent are available.
The following options are available for 649B Pressure Controllers with Integral Baratron® Manometer and Mass Flow Meter
Ordering Code Example: 649B00413T12C2VR
Configuration Option | Option Code |
---|---|
649B Pressure Controller with MFM |
649B |
Gas |
|
Helium (He) | 001 |
Argon (Ar) | 004 |
Hydrogen (H |
007 |
Nitrogen (N |
013 |
Pressure Range Full Scale |
|
10 Torr | 11T |
20 Torr | 21T |
50 Torr | 51T |
100 Torr | 12T |
1000 Torr | 13T |
Full Scale Flow Rate |
|
10 sccm | 11C |
20 sccm | 21C |
50 sccm | 51C |
100 sccm | 12C |
200 sccm | 22C |
500 sccm | 52C |
1000 sccm | 13C |
2000 sccm | 23C |
5000 sccm | 53C |
Orifice Size |
|
A (50 sccm) | A |
#1 (200 sccm) | 1 |
#2 (1000 sccm) | 2 |
#3 (5000 sccm) | 3 |
Plug Material |
|
Viton | V |
Kalrez | D |
Metal | M |
Kel-F | F |
Fittings (compatible with) |
|
Swagelok 4 VCR male | R |
Swagelok 8 VCR male | T |