The GPCMA is a metal-sealed pressure controller with an integral mass flow meter. It is suited for a wide variety of applications requiring pressure control capability from 500 Torr to 100 psi. The GPCMA incorporates the latest in digital flow control electronics along with a well proven, thermally stable pressure sensor and mechanical design. The mass flow meter provides the capability of monitoring mass flow rates as a diagnostic for critical process applications.
Features
Digital I/O
High Purity Applications
The GPCMA, with 4 VCR® fittings, is 1.125'' (28.6 mm) wide and 4.88'' (124 mm overall) length allowing it to fit in standard gas systems. It is also available with the 1.125'' (38.6 mm) IGS compatible c-seal and w-seal configurations. The GPCMA metal-sealed, pressure controller with its 10 microinch, electropolished surface finish is well suited for use in high purity process applications. The GPCMA is available with a normally closed valve.
Resources
Drawings & CADs
GPCA/GPCMA Mass Flow Controller Dimensional Drawings(429.9 kB, PDF) GPCMA Pressure Controller 3D Model Files
Literature
Manuals
G-Series Pressure Controller Manual(1.9 MB, PDF) GPCA/GPCMA Pressure Controller Pin-outs(22.2 kB, PDF) G Series Pressure Controller DeviceNet Manual Supplement(635.6 kB, PDF)
Device Description Files
MKS GPCMA ESI File(231.8 kB, XML) MKS GPCMA EDS File(353.7 kB, EDS)
