905 MicroPirani™ Vacuum Pressure Transducer Kit

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Overview

The 905 MicroPirani™ Vacuum Sensor Kit is an ultra-compact wide range vacuum transducer designed for OEM system integration. The transducer is based on well proven thermal conductivity MEMS (Micro-Electron Mechanical Systems) sensor technology and meets the demand for integrated vacuum measurement solutions.

Wide measurement range from atmosphere to 10^-5 Torr
Three open collector set points for advanced process control
User-friendly digital control via host processor or computer
Robust solid state sensor is resistant to vibrations and g-forces
Standard DIP 28 pin footprint for easy integration
Analog output 0.5 VDC per decade

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Products

		Compare	Description	Compatibility	sortOrder	rankScore	ranking	Drawings, CAD & Specs		Type	Availability	Featured Item	Price		Brand
		905-0003 Electronics Module, MicroPirani™ Vacuum Sensor Kit, Nude Sensor $684 Show	905-0003 Electronics Module, MicroPirani™ Vacuum Sensor Kit, Nude Sensor	UNIVERSAL	0.0	1.0	0.0		0.0	Electronics Module, Nude Sensor	Show		$684
		905-0004 Electronics Module, MicroPirani™ Vacuum Sensor Kit, PCB Sensor $684 Show	905-0004 Electronics Module, MicroPirani™ Vacuum Sensor Kit, PCB Sensor	UNIVERSAL	0.0	1.0	0.0		0.0	Electronics Module, Sensor PCB, 200 mm Cable	Show		$684

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Specifications

Digital Communication

Serial UART, TTL level
Measurement Range

1 x 10-5 to 760 Torr
1 x 10-5 to 1000 mbar
1 x 10-3 to 1 × 10+5 Pascal
Operating Temperature

5° to 40°C (41° to 104°F)
Maximum Bakeout Temperature

130°C (266°F)
Storage Temperature

-10° to 55°C (14° to 131°F)
Analog Output

0.5 VDC - 4.5 VDC

Power Requirements

+5 VDC (±2%), 45 mA
MicroPirani Accuracy

5% (typical measuring accuracy from 1E-3 to 100 Torr Nitrogen pressure measured at 25°C)
Exposed Materials

Silicon, SiO2, SiN4, Epoxy, Gold
Weight

9 grams (Electronics Module)
Set Point Configuration

3 open collector outputs, 50 mA sink current
Units

Torr, mbar, Pascal