910 DualTrans™ MicroPirani™ - Absolute Piezo Vacuum Pressure Transducers
Overview
Designed specifically for wide-range pressure measurement applications, the 910 Transducer combines Piezo and Micro Pirani™ sensor technologies. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges.
- Absolute pressure measurement from 1500 to 10-5 Torr
- Two sensors in a single transducer for wide measurement range
- Gas independent absolute pressure measurement from 11 to 1500 Torr
- Fast, accurate and repeatable pressure measurements reduces process cycle time
- Optional 3 set points with fast response time for reliable process control
- Optional integrated touch-screen display available for local pressure indication etc
Products
| Compare | Description | Drawings, CAD & Specs | Availability | Price | |||
|---|---|---|---|---|---|---|---|
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910-11030 | $768 |
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910-11034 | $961 |
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910-12030 |
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$768 |
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910-12034 | $961 |
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910-21030 | $780 |
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910-21034 |
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$974 |
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910-22030 | $780 |
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910-22034 | $973 |
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910-31030 | $786 |
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910-31034 | $979 |
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910-32030 | $786 |
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910-32034 | $979 |
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910-41030 | $806 |
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910-41034 | $1,000 |
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910-42030 | $806 |
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910-42034 | $1,000 |
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910-51030 | $825 |
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910-51034 | $1,017 |
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910-52030 | $825 |
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910-52034 | $1,017 |
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910-81030 | $825 |
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910-81034 | $1,017 |
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910-82030 | $825 |
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910-82034 | $1,017 |
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Configuration Options
The following options are available for 910 Vacuum Pressure Transducers
Ordering Code Example: 910-11030
| Configuration Option | Option Code |
|---|---|
| 910 Vacuum Pressure Transducer | 910 |
Fitting |
|
| NW16 ISO-KF | 1 |
| NW25 ISO-KF | 2 |
| 0.125 in. NPT male | 3 |
| 4 VCR female | 4 |
| 8 VCR female | 5 |
| 1.33 in. OD CF | 6 |
| NW16 ISO-KF, extended | 8 |
Communication |
|
| RS232 | 1 |
| RS485 | 2 |
Analog Output |
|
| 1-9.2 VDC | 0 |
Relays |
|
| No relays | 2 |
| 3 relays | 3 |
| 3 relays, dual analog out | 5 |
Display |
|
| No display | 0 |
| No display, IP54 | 2 |
| Display | 4 |
| Display, SI | 6 |
Specifications
-
Absolute Measurement Range1.0 x 10-5 to 1,500 Torr
-
Digital CommunicationRS485/RS232 (4800-230400 Baud)
-
SensorType 1: MicroPirani (MEMS Thermal Conductivity)
Type 2: Piezo Absolute (MEMS Diaphragm) -
Relays3 relays SPDT (optional)
-
Installation OrientationAny
-
Set Point RangeAbsolute: 5.0 x 10-4 to 1,500 Torr
-
Calibration GasAir, Argon, Helium, Nitrogen, H2, H2O vapor, CO2, xenon, Neon
-
Operating Temperature0- 40°C (32-104°F)
-
Maximum Bakeout Temperature85°C (185°F), non-operating
-
Digital ControlsZero adjust, span adjust, analog output, pressure units, baud rate, address, factory default, set point functions: value, hysteresis, direction, enable, transducer status, switch, LED test
-
Digital StatusPressure reading, units, set point, operating time, transducer temperature, user tag, model, device type, serial number, firmware and hardware versions, part number, manufacturer
-
Analog Output1-9.2 VDC, 1 VDC/decade, 100Ω maximum output impedance (absolute pressure)
-
Analog Output Resolution16 bit
-
Relay Contact Rating1 A @ 30VAC/DC, resistive
-
Relay Response100 msec maximum
-
Power Requirements9-30 VDC, 150 ma, < 1.2 watts maximum
-
Accuracy5 x 10-4 to 1 x 10-3 Torr ±10% of reading
1 x 10-3 to 11 Torr ±5% of reading
11 to 1000 Torr ±0.75% of reading -
Repeatability5 x 10-4 to 10-3 Torr ±8% of reading
10-3 Torr to 11 Torr ±2% of reading
11 to 1000 Torr ±0.2% of reading -
Overpressure Limit2250 Torr (absolute)
-
Internal Volume2.8 cc (KF16)
-
Exposed MaterialsSilicon, SiO2, Si3N4, gold, low outgassing epoxy resin, 304 stainless steel, Viton®
-
Electronic Casing and Flange304 stainless steel
-
Weight170 g (with KF 16 Flange)
-
ComplianceCE
Features
Resources
Manuals
- 900 Series Vacuum Transducer USB Adapter Manual (129.6 kB, PDF)
- 910 Vacuum Transducer Pin-outs (25.9 kB, PDF)
- 910 DualTrans™ Transducer Manual (100017123, Rev. G) (2.6 MB, PDF)
- 900 Series EtherCAT Communication Protocol Manual (20003335) (925.8 kB, PDF)
Drawings & CADs
- 910 Vacuum Transducer Dimensional Drawing (66.8 kB, PDF)
Literature
- 910 DualTrans™ MicroPirani™/Absolute Piezo Vacuum Transducer (297.3 kB, PDF)
- Vacuum Measurement Product Guide (711.5 kB, PDF)
Other
- 910 RoHS Certificate of Compliance (525.7 kB, PDF)
Ultra-High Velocity